|
|
|
2009 Refereed Journal Papers (1) J. Lo, S.-J. Chen, Q. Fang, T. Papaioannou, E.S. Kim, M. Gundersen and L. Marcu, “Performance of Diaphragmed Microlens for a Packaged Microspectrometer,” Sensors, vol. 9, no. 2, pp. 859-868, 2009. (2) H. Yu, C. Lee, W. Pang, H. Zhang, A. Brannon, J. Kitching, and E.S. Kim, “HBAR-Based 3.6 GHz Oscillator with Low Power Consumption and Low Phase Noise,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency, vol. 56, no. 2, pp. 400 – 403, 2009. Refereed
Conference Papers (1)
L. Baumgartel and
E.S. Kim, “Experimental Optimization of Electrodes for High Q, High
Frequency HBAR,” IEEE International Ultrasonics
Symposium, (2)
S.J. Chen, C.Y. Lee, and E.S. Kim, "Integration
of Tunable Capacitors and Bonded-Wires for Contactless
RF Switch and Tunable Filter," Transducers '09, IEEE International
Conference on Solid-State Sensors and Actuators, Denver, CO, June 21 - 25,
2009, pp. 545 - 548. (3)
J. Zhu, X. Qiu, J. Oiler, C. Yu, Z. Wang, C. Lee, T.K. Hsiai,
E.S. Kim, and H. Yu, "Localized Cell Lysis
Using Self Focused Acoustic Transducers," Transducers '09, IEEE
International Conference on Solid-State Sensors and Actuators, Denver, CO,
June 21 - 25, 2009, pp. 608 - 611. (4)
A. Lin and E.S. Kim, "Selectivity and
Long-term Reliability of Resonant Explosive-Vapor-Trace Detection Based on
Antigen-Antibody Binding," IEEE International Micro Electro Mechanical
Systems Conference, (5)
S.H. 2008 Refereed Journal Papers (1)
C.Y. Lee, H. Yu, S.C. Hill, W. Pang, and E.S. Kim, “Airborne
particle generation through acoustic ejection of particles-in-droplets,”
Aerosol Science & Technology, vol. 42, no. 10, pp. 832-841, 2008. (2)
C.Y. Lee, W. Pang, H. Yu, and E.S. Kim, “Subpicoliter Droplet Generation Based on a
Nozzle-free Acoustic Transducer,” Applied Physics Letters, vol. 93,
034104, 2008. (3)
C.Y. Lee, W. Pang, S. Chen, D. Chi, H. Yu, and
E.S. Kim, “Surface Micromachined,
Complementary-Metal-Oxide-Semiconductor Compatible Tunable Capacitor with
14:1 Continuous Tuning Range,” Applied Physics Letters, vol. 92,
044103, 2008. (4) H. Yu, L. Ai, M. Rouhanizadeh, D. Patel, E.S. Kim, and T.K. Hsiai, “Flexible Polymer Sensors for In Vivo Intravascular Shear Stress Analysis,” IEEE/ASME Journal of Microelectromechanical Systems, vol. 17, no. 5, pp. 1178 – 1186, 2008. (5) J.M. Cannata, J.A. Williams, Q.F. Zhou, L. Sun, K. K. Shung, H. Yu, and E.S. Kim, "Self-focused ZnO Transducers for Ultrasonic Biomicroscopy," Journal of Applied Physics, 103: 084109, 2008. (6) C.Y. Lee, H. Yu, and E.S. Kim, “Droplet-Based Microreactions with Oil Encapsulation,” IEEE/ASME Journal of Microelectromechanical Systems, vol. 17, no. 1, pp. 147 - 156, 2008. (7)
Q. Zou, W. Tan, E.S. Kim and G.E. Loeb, “Single-axis and Tri-axis Piezoelectric
Bimorph Accelerometer,” IEEE/ASME Journal of Microelectromechanical
Systems, vol. 17, no. 1, pp. 45 – 57, 2008. Refereed Conference Papers (1) E.S. Kim, “Piezoelectric MEMS for Audio Signal Transduction, Microfluidic Management, Resonant Mass Sensing, and Movable Surface Micromachined Structures,” November 2-5, 2008, IEEE International Ultrasonics Symposium, Beijing, China, November 2-5, 2008, pp. 924 – 929, Invited. (2) H. Yu, L. Ai, M. Rouhanizadeh, T. K. Hsiai, and E.S. Kim, “Flexible Shear Stress Sensor for In Vivo Cardiovascular Testing,” Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 1-5, 2008, June 1-5, 2008, pp. 142-145. (3) C. Lee, S. Chen, D. Chi, H. Yu, and E.S. Kim, " Surface Micromachined GHz Tunable Capacitor with 14:1 Continuous Tuning Range," IEEE International Micro Electro Mechanical Systems Conference, Tucson, AZ, January 13 – 17, 2008, pp. 1008-1011. (4)
Lin, H. Yu, M. Waters, E.S. Kim, and S. D. Goodman,
"Explosive Trace Detection with
FBAR-Based Sensor," IEEE International Micro Electro Mechanical
Systems Conference, 2007 Refereed Journal Papers (1) H. Zhang, M.S. Marma, S. Kamal-Bahl, E.S. Kim, and C.E. McKenna, “Sequence Specific Label-Free DNA Sensing Using Film-Bulk-Acoustic-Resonators,” IEEE Sensors Journal, vol. 7, no 12, pp. 1587-1588, 2007. (2) H. Yu, W. Pang, H. Zhang and E.S. Kim, “Ultra Temperature-Stable Bulk-Acoustic-Wave Resonators with SiO2 Compensation Layer,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency, vol. 54, no. 10, pp. 2102 – 2109, 2007. (3) C.Y. Lee, S. Kamal-Bahl, H. Yu, J.W. Kwon and E.S. Kim, “On-Demand DNA Synthesis on Solid Surface by Four Directional Ejectors on a Chip,” IEEE/ASME Journal of Microelectromechanical Systems, vol. 16, no. 5, pp. 1130-1139, 2007. (4) W. Pang, H. Zhang, H. Yu and E.S. Kim, “Electrical Frequency Tuning of Film Bulk Acoustic Resonator,” IEEE/ASME Journal of Microelectromechanical Systems, vol. 16, no. 6, pp. 1303 – 1313, 2007. (5) H. Zhang, M.S. Marma, E.S. Kim, C.E. McKenna and M.E. Thompson, ”Mercuric Ion Sensing by Film-Bulk-Acoustic-Resonator,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 54, pp. 1723-1725, 2007. (6) Q.F. Zhou, C. Sharp, J.M. Cannata, K.K. Shung, G.H. Feng and E.S. Kim, ”Self-focusing High Frequency Ultrasonic Transducers Based on ZnO Piezoelectric Films,” Applied Physics Letters, vol. 90, 113502, 2007. (7) H. Yu, Q. Zou, J.W. Kwon, D. Huang and E.S. Kim, “Liquid Needle,” IEEE/ASME Journal of Microelectromechanical Systems, vol. 16, no. 2, pp. 445 - 453, 2007. Refereed Conference Papers (1) H. Yu, C. Lee, W. Pang, H. Zhang, and E.S. Kim, " Low Phase Noise, Low Power Consuming 3.7 GHz Oscillator Based on High-overtone Bulk Acoustic Resonator," IEEE International Ultrasonics Symposium, New York, NY, October 29-31, 2007, pp. 1160 - 1163.. (2) H. Yu, D. Wu, C. Lee, Q. Zhou, E.S. Kim, and K.K. Shung, "High-overtone Self-Focusing Acoustic Transducer for High Frequency Ultrasonic Imaging," IEEE International Ultrasonics Symposium, New York, NY, October 29-31, 2007, , pp. 2401 - 2404. (3) J. Cannata, J. Williams, Q. Zhou, H. Yu, E.S. Kim, and K. K. Shung, " Self-focused ZnO Transducers for Ultrasonic Biomicroscopy," IEEE International Ultrasonics Symposium, New York, NY, October 29-31, 2007, pp. 945 – 948. (4) H. Yu, L. Ai, M. Rouhanizadeh, R. Hamilton, J. Hwang, E.S. Kim and T.K. Hsiai, “Flexible Catheter-Based Cardiovscular Shear Stress Sensor,” 2007 BMES Annual Fall Meeting, Los Angles, CA, September 26-29, 2007, Accepted. (5)
C. Lee, H. Yu, and E.S. Kim, "Harmonic Operation of Acoustic Transducer for
Droplet Ejection Application," Transducers '07, IEEE International
Conference on Solid-State Sensors and Actuators, (6) J.F. Lo, S.J. Chen, H. Yu, E.S. Kim, L. Marcu, and M. Gundersen, "Multi-Cantilever-Driven Rotational Translation for Actuated Micro Optical Grating," Transducers '07, IEEE International Conference on Solid-State Sensors and Actuators, Lyon, France, June 10-14, 2007, pp. 2421-2424. (7) H. Yu, L. Ai, M. Rouhanizadeh, R. Hamilton, J. Hwang, E. Meng, E.S. Kim and T.K. Hsiai, “Polymer-Based Cardiovascular Shear Stress Sensors,” ASME Frontiers in Biomedical Devices Conference, Irvine, CA, June 7-8, 2007, BioMed2007-38089. (8) C. Lee, H. Yu, and E.S. Kim, "Microreactions Using Nanoliter Droplets with Oil Encapsulation," IEEE International Micro Electro Mechanical Systems Conference, Kobe, Japan, January 21 – 25, 2007, pp. 81-84. (9) J. Dutta, H. Yu, C. Lee, and E.S. Kim, "Liquid Jet Propeller Integrated with Reservoir, Channel, and Cover," IEEE International Micro Electro Mechanical Systems Conference, Kobe, Japan, January 21 – 25, 2007, pp. 683-686. (10) J.F.
Lo, L. Marcu, and E.S. Kim, "Wafer-Level Packaging of Three-Dimensional
MOEMS Device with Lens Diaphragm," IEEE International Micro Electro
Mechanical Systems Conference, 2006 Refereed Journal Papers (1)
H. Zhang, W. Pang, H. Yu and E.S. Kim, “High-tone Bulk Acoustic Resonators on
Sapphire, Crystal Quartz, Fused Silica and Silicon Substrates,”
Journal of Applied Physics, vol. 99, 124911, 2006. (2) C. Lee, H. Yu and E.S. Kim, “Nanoliter Droplet Coalescence in Air by Directional Acoustic Ejection,” Applied Physics etters, vol. 89, 223902, 2006. (3) W. Pang, L. Yan, H. Zhang, H. Yu, E.S. Kim and W.C. Tang, ”Femtogam Mass Sensing Platform Based on Lateral-extensional-mode (LEM) Piezoelectric Resonator, ” Applied Physics Letters, vol. 88, 243503, 2006. (4) J.W. Kwon, H. Yu, Q. Zou and E.S. Kim, ”Directional Ejection of Liquid Droplets by Sectored Self-Focusing Acoustic Transducers Built on ZnO and PZT, ” Journal of Micromechanics and Microengineering, vol. 16, no. 12, pp. 2697-2704, 2006. (5) C. Lee and E.S. Kim, ”Piezoelectrically Actuated Tunable Capacitor, ” IEEE/ASME Journal of Microelectromechanical Systems, vol. 15, no. 4, pp. 745-755, 2006. (6) H. Yu, J.W. Kwon and E.S. Kim, ”Microfluidic Mixer and Transporter Based on PZT Self-Focusing Acoustic Transducers, ” IEEE/ASME Journal of Microelectromechanical Systems, vol. 15, no. 4, pp. 1015-1024, 2006. (7) L. Yan, W. Pang, E.S. Kim and W.C. Tang, ”Single-chip Multiple-frequency VHF Low Impedance Micro Piezoelectric Resonators, ” IEEE Electron Device Letters, vol. 27, no. 4, pp. 246-248, 2006. (8) J.W. Kwon, S. Kamal-Bahl and E.S. Kim, ”In-situ DNA Synthesis on Glass Substrate for Microarray Fabrication Using Self-Focusing Acoustic Transducer, ” IEEE Transactions on Automation Science and Engineering, vol. 3, no. 2, pp. 152-158, 2006. Refereed Conference Papers (1) H. Zhang, Q. Zou, E.S. Kim, A.M. Madni, L.E. Costlow and R.F. Wells, “Frequency-Mismatch-Tolerant Silicon Vibratory Gyroscope without Vacuum Package for Automotive Applications,” World Automation Congress, Budapest, Hungary, July 24-27, 2006, Tracking #ISIAC-244. (2)
C. Lee, H. Yu, and E.S. Kim, “Controlled Droplet Coalescence in Air and
Its Application to Micromixing,”
Solid-State Sensor and Actuator Workshop, (3)
H. Yu, H. Zhang, W. Pang, and E.S. Kim, “Temperature Stable, Post-Process Tunable,
High Q HBARs at 3~5 GHz,” Solid-State
Sensor and Actuator Workshop, (4)
C. Lee, H. Yu, and E.S. Kim, "Acoustic Ejector with Novel Lens Employing
Air-Reflectors," IEEE International Micro Electro Mechanical Systems
Conference, (5)
H. Zhang, W. Pang and E.S. Kim, "Micromachined SU-8 Probe Integrated with Film-bulk-acoustic
Resonant Mass Sensor," IEEE International Micro Electro Mechanical
Systems Conference, (6) W. Pang, L. Yan, H. Zhang, H. Yu, E.S. Kim and W.C. Tang, "Ultra-sensitive Mass Sensor Based on Lateral Extensional Mode Piezoelectric Resonator," IEEE International Micro Electro Mechanical Systems Conference, Istanbul, Turkey, January 22 – 26, 2006, pp. 78-81. (7) J. Lo, Q. Fang, W. Pang, T. Papaioannou, Q. Shui, E.S. Kim, M.A. Gundersen and L. Marcu, (Invited Paper), “Packaging and Characteristics of a Micro Fluorescence Spectroscopy Analyzer,” SPIE International Symposium on Biomedical Optics 2006, San Jose, California, January 21-26, 2006, Proceedings of SPIE, vol. 6080, 60800H (Feb. 25, 2006). 2005 Refereed Journal Papers (1)
L. Yan, W. Pang, E.S. Kim and W.C. Tang, “Piezoelectrically-transduced Low-impedance Microelectromechanical Resonators,” Applied
Physics Letters, vol. 87, no. 15, 154103, 2005. (2)
J.W. Kwon, H. Yu and E.S. Kim, “Film
Transfer and Bonding Techniques for Covering Single-Chip Ejector Array with Microchannels and Reservoirs,” IEEE/ASME
Journal of Microelectromechanical Systems, vol. 14,
no. 6, pp. 1399-1408, 2005. (3) W. Pang, H. Zhang, H. Yu and E.S. Kim, "Micromachined Acoustic Wave Resonator Isolated from Substrate," IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, vol. 52, no. 8, pp. 1239-1246, 2005. (4) H. Zhang, M. Marma, E.S. Kim, C. McKenna and M. Thompson, "A Film Bulk Acoustic Resonator in Liquid Environments," Journal of Micromechanics and Microengineering, vol. 15, no. 10, pp. 1911-1916, 2005. (5)
W. Pang, H. Yu, H. Zhang, and E.S. Kim, "Temperature
Compensated Film Bulk Acoustic Resonator above (6)
S.H. Yi and E.S. Kim, “Micromachined Piezoelectric Microspeaker,”
Japanese Journal of Applied Physics, vol. 44, no. (7) H. Zhang and E.S. Kim, "Micromachined Acoustic Resonant Mass Sensor," IEEE/ASME Journal of Microelectromechanical Systems, vol. 14, no. 4, pp. 699-706, 2005. (8) J.W. Kwon and E.S. Kim, "Fine ZnO Patterning With Controlled Sidewall-Etch-Front Slope," IEEE/ASME Journal of Microelectromechanical Systems, vol. 14, no. 3, pp. 603-609, 2005. (9) C.H. Han and E.S. Kim, “Simulation of Piezoelectric Dome-Shaped-Diaphragm Acoustic Transducers,” Journal of Semiconductor Technology and Science, vol. 5, no. 1, pp. 17-23, 2005. (10) G.-H. Feng and E.S. Kim, "Piezoelectrically Actuated Dome-Shaped-Diaphragm Micropump," IEEE/ASME Journal of Microelectromechanical Systems, vol. 14, pp. 192-199, 2005. (11) H. Yu, J.W. Kwon and E.S. Kim, "Chembio Extraction on a Chip by Nanoliter Droplet Ejection," Lab on a Chip, vol. 5, no. 3, pp. 344 - 349, 2005. (12) G.-H. Feng, C.C. Sharp, Q.F. Zhou, W. Pang, E.S. Kim and K.K. Shung, "Fabrication of MEMS ZnO Dome-Shaped-Diaphragm Tranducers for High Frequency Ultrasonic Imaging," Journal of Micromechanics and Microengineering, vol. 15, no. 3, pp. 586-590, 2005. (13) G. Soundararajan, M. Rouhanizadeh, H. Yu, L. DeMaio, E.S. Kim and T.K. Hsiai, "MEMS Shear Stress Sensors for Microcirculation," Sensors and Actuators A: Physical, vol. 118, no. 1, pp. 25-32, 2005. Refereed Conference Papers (1)
H. Zhang, M. Marma, E.S. Kim, C. McKenna and M.
Thompson, "Mercury Ion Sensing by Film-Bulk-Acoustic-Resonator Mass
Sensor," IEEE Conference on Sensors, Irvine, CA, Oct. 31 - Nov. 3,
2005, pp. 203-206. (2)
W. Pang, H. Zhang and E.S. Kim, "Analytical
and Experimental Study on Second Harmonic Response of FBAR for Oscillator
Application," IEEE International Ultrasonics
Symposium, (3)
S. Kamal-Bahl and E.S. Kim, "DNA Microarray Fabrication Using Directional Self-Focusing
Acoustic Transducer Array," IEEE International Ultrasonics
Symposium, (4) H. Zhang, W. Pang and E.S. Kim, "High-frequency Bulk Acoustic Resonant Microbalances in Liquid," Joint IEEE International Frequency Control Symposium and Precise Time and Time Interval (PTTI) Systems and Applications Meeting, Vancouver, Cananda, August 29-31, 2005, pp. 73-77. (5) W. Pang, H. Zhang, J.J. Kim, H. Yu and E.S. Kim, "High-Tone Bulk Acoustic Resonator Integrated with Surface Micromachined FBAR Filter on a Single Chip," Transducers '05, IEEE International Conference on Solid-State Sensors and Actuators (Seoul, Korea), June 5-9, 2005, pp. 2057-2060. (6)
J.J. Kim, H. Zhang, W. Pang, H. Yu and E.S. Kim, "Low Phase
Noise, FBAR-Based Voltage Controlled Oscillator without Varactor,"
Transducers '05, IEEE International Conference on Solid-State Sensors and
Actuators ( (7)
J.W. Kwon, S. Kamal-Bahl
and E.S. Kim, "Film
Transfer and Bonding Technique to Cover Lab on a Chip," Transducers
'05, IEEE International Conference on Solid-State Sensors and Actuators ( (8)
H. Zhang, J.J. Kim, W. Pang, H. Yu and E.S. Kim, " (9) S.H. Yi, J.M. Park, Y.H. Park, S.H. Han, N.K. Min, C.H. Cho and E.S. Kim, "Novel NDIR CO2 Sensor for Indoor Air Quality Monitoring," Transducers '05, IEEE International Conference on Solid-State Sensors and Actuators (Seoul, Korea), June 5-9, 2005, pp. 1211-1214. (10) W.
Pang, H. Yu, H. Zhang and E.S.
Kim, "Electrically Tunable and Temperature Compensated FBAR,"
IEEE MTT-S 2005 International Microwave Symposium ( (11) W.
Pang, H. Zhang, J.J. Kim, H. Yu and E.S. Kim, "High-Tone
Bulk Acoustic Resonator Integrated with FBAR Filter on a Single Chip,"
IEEE MTT-S 2005 International Microwave Symposium ( (12) H. Yu, W. Pang, H. Zhang and E.S. Kim, "Film Bulk Acoustic Resonator at 4.4 GHz with Ultra Low Temperature Coefficient of Resonant Frequency," IEEE International Micro Electro Mechanical Systems Conference, Miami, Florida, January 30 - February 3, 2005, pp. 28-31. (13) J. Lo, E.S. Kim, M.A. Gundersen and L. Marcu, "Piezoelectric Optical MEMS Scanning Fluorescence Biosensor," SPIE International Symposium on Biomedical Optics 2005, San Jose, California, January 22-27, 2005, Proc. SPIE vol. 5692, pp. 103-110 2004 Refereed Journal Papers (1)
G. H. Feng and E.S. Kim, "Micropump Based on PZT Unimorph
and One-Way Parylene Valves," Journal of Micromechanics and Microengineering, vol. 14, no. 4, pp. 429-435, 2004. Refereed Conference Papers (1)
G.E. Loeb, W. Tan, N. Sachs, Q. Zou and E.S.
Kim, "A Modular Approach to Sensing Limb Position in FES
Patients," Proc. 9th Ann. Mtg. International Functional Electrical
Stimulation Soc., Bournemouth, U.K., Sept. 6-9, 2004
(http://www.ifessnet2004.tk) (2)
Q. Zou, W. Tan, E.S. Kim, J. Singh and G.E.
Loeb, "Implantable Biaxial Piezoresistive
Accelerometer for Sensorimotor Control," IEEE
Engineering in Medicine and Biology Society (EMBS) Annual Conference (San
Francisco, California), September 1-5, 2004, pp. 4279-428. (3)
W. Tan, Q. Zou, E.S. Kim and G.E. Loeb,
"Sensing Human Arm Postureition and
Orientation with Implantable Sensors," IEEE Engineering in Medicine and
Biology Society (EMBS) Annual Conference ( (4)
W. Pang, H. Zhang, H. Yu and E.S. Kim, “Electrically
Tunable and Switchable Film Bulk Acoustic
Resonator,” IEEE International Ultrasonics
Symposium ( (5)
W. Pang, H. Yu, H. Zhang and E.S. Kim, “Self-Aligned
Lateral Field Excitation Film Acoustic Resonator with Very Large
Electromechanical Coupling,” IEEE International Ultrasonics
Symposium ( (6) G. -H Feng, C. Sharp, Q.F. Zhou, E.S. Kim and K.K. Shung, “Fabrication of Dome-Shaped-Diaphragm-Transducer Array for High Frequency Biomedical Image Application,” IEEE International Ultrasonics Symposium (Montreal, Canada), August 24-27, 2004, pp. 1950-1953. (7)
C. Sharp, G.-H. Feng,
Q.F. Zhou, J. Cannata, E.S. Kim and K.K. Shung, “200 MHz Self-Focused ZnO
MEMS Ultrasonic Transducers for Biomedical Imaging,” IEEE International
Ultrasonics Symposium ( (8) L. Yan, W. Pang, J. Wu, W.C. Tang and E.S. Kim, "High Frequency Micromechanical Piezo Actuated Disk Resonator," Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 6-10, 2004, pp. 372-375. (9) G.-H. Feng and E.S. Kim, "Micropump Based on PZT Unimorph and One-Way Parylene Valves," Journal of Micromechanics and Microengineering, vol. 14, no. 4, pp. 429-435, 2004. (10) W.
Pang, H. Zhang, S. Whangbo and E.S. Kim, "High Q Film Bulk
Acoustic Resonator from 2.4 to (11) H.
Yu and E.S. Kim,
"Ultrasonic Underwater Thruster," IEEE International Micro Electro
Mechanical Systems Conference, (12) H. Zhang, M. Marma, E.S. Kim, C. McKenna and M. Thompson, "Implantable Resonant Mass Sensor For Liquid Bio-chemical Sensing," IEEE International Micro Electro Mechanical Systems Conference, Maastricht, The Netherlands, January 25-29, 2004, pp. 347-350. (13) Q.
Zou, W. Tan, E.S. Kim, and G.E. Loeb,
"Highly Symmetric Tri-axis Piezoelectric Bimorph Accelerometer,"
IEEE International Micro Electro Mechanical Systems Conference, 2003 Refereed Journal Papers (1) M. Niu and E.S. Kim, "Piezoelectric Bimorph Microphone Built on Micromachined Parylene Diaphragm," IEEE/ASME Journal of Microelectromechanical Systems, vol. 12, pp. 892-898, December 2003. Refereed Conference Papers (1) H. Yu and E.S. Kim, "Liquid Separation for Chemical Extraction by Large Droplet Ejection and Millimeter High Liquid Fountain," Transducers '03, IEEE International Conference on Solid-State Sensors and Actuators (Boston, MA), June 8-12, 2003, pp. 611-614. (2) Q. Zou, Wei Tan, E.S. Kim, and Gerald E. Loeb "Implantable Bimorph Piezoelectric Accelerometer for Feedback Control of Functional Neuromuscular Stimulation," Transducers '03, IEEE International Conference on Solid-State Sensors and Actuators (Boston, MA), June 8-12, 2003, pp. 1379-1382. (3) K. Lee, S. Park and E.S. Kim, "Improved Electromagentic Displacement Transducer with Large Force for Implantable Middle Ear Hearing Aid," Transducers '03, IEEE International Conference on Solid-State Sensors and Actuators (Boston, MA), June 8-12, 2003, pp. 1217-1220. (4) H. Zhang and E.S. Kim, "Vapor and Liquid Mass Sensing by Micromachined Acoustic Resonator," IEEE International Micro Electro Mechanical Systems Conference, Kyoto, Japan, January 19-23, 2003, pp. 470-473. (5) H. Yu and E.S. Kim, "Micropropulsion of Air and Liquid Jet by Acoustic Streaming," IEEE International Micro Electro Mechanical Systems Conference, Kyoto, Japan, January 19-23, 2003, pp. 76-79. (6) G.-H. Feng and E.S. Kim, "Universal Concept for Fabricating Micron to Millimeter Sized 3-D Parylene Structures on Rigid and Flexible Substrates," IEEE International Micro Electro Mechanical Systems Conference, Kyoto, Japan, January 19-23, 2003, pp. 594-597. 2002 Refereed Journal Papers (1) S.H. Yi, F. von Preissig and E.S. Kim, “Electroless Nickel Films: Properties and Fabricated Cavity Structure,” IEEE/ASME Journal of Microelectromechanical Systems, vol. 11, pp. 293-301, August 2002. (2) J.W. Kwon and E.S. Kim, "Multi-Level Microfluidic Channel Routing with Protected Convex Corners," Sensors and Actuators: A. Physical, vol. 97-98, pp. 729-733, April 2002. Refereed Conference Papers (1) H. Zhang and E.S. Kim, “Air-backed Al/ZnO/Al Film Bulk Acoustic Resonator without Any Support Layer,” IEEE International Frequency Control Symposium, New Orleans, LA, May 29-31, 2002, pp. 20-26. (2) J.W. Kwon and E.S. Kim, " Fine ZnO Patterning with Controlled Sidewall-Etch-Front Slope," Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 2 - 6, 2002, pp. 223-226. (3) H. Yu and E.S. Kim, " Large Area Microfluidic Mixer Integrated with Linear Fluidic Transporters and Reservoirs," Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 2 - 6, 2002, pp. 362-365. (4) S.H. Yi and E.S. Kim, "Piezoelectric Micro-speaker with Compressive Nitride Diaphragm," IEEE International Micro Electro Mechanical Systems Conference, Las Vegas, Nevada, January 20-24, 2002, pp. 260-263. (5) J.W. Kwon, Q. Zou and E.S. Kim, "Directional Ejection of Liquid Droplets through Sectoring Half-Wave-Band Sources of Self-Focusing Acoustic Transducer," IEEE International Micro Electro Mechanical Systems Conference, Las Vegas, Nevada, January 20-24, 2002, pp. 121-124. (6) H. Yu and E.S. Kim, "Noninvasive Acoustic-Wave Microfluidic Driver," IEEE International Micro Electro Mechanical Systems Conference, Las Vegas, Nevada, January 20-24, 2002, pp. 125-128. 2001 Refereed Journal Papers (1) D. Huang and E.S. Kim, "Micromachined Acoustic-Wave Liquid Ejector," IEEE/ASME Journal of Microelectromechanical Systems, vol. 10, pp. 442-449, September 2001. Refereed Conference Papers (1) S.H. Yi and E.S. Kim, " Piezoelectric Bimorph Microphone with Serial Electrical Connection," International Mechanical Engineering Congress and Exposition, Symposium on Microelectromechanical Systems (New York, NY), November 11-16, 2001, CD Index No. MEMS-23857 (7 pages). (2) J.W. Kwon and E.S. Kim, "Microfluidic Channel Routing with Protected Convex Corners," Transducers '01, IEEE International Conference on Solid-State Sensors and Actuators (Munich, Germany), June 10-14, 2001, pp. 644-647. (3) Q. Zou, D. Huang and E.S. Kim, "Water Needle – A New Phenomenon for Ink-Jet Printing," Transducers '01, IEEE International Conference on Solid-State Sensors and Actuators (Munich, Germany), June 10-14, 2001, pp. 894-897. (4) M. Niu and E.S. Kim, "Bimorph Piezoelectric Acoustic Transducer," Transducers '01, IEEE International Conference on Solid-State Sensors and Actuators (Munich, Germany), June 10-14, 2001, pp. 110-113. (5) C.-H. Han and E.S. Kim, "Fabrication of Piezoelectric Acoustic Transducers Built on Cantilever-like Diaphragm," IEEE International Micro Electro Mechanical Systems Conference, Interlaken, Switzerland, January 21-25, 2001, pp. 110-113. 2000 Refereed Journal Papers (1) B. Lee and E.S. Kim, "Analysis of Partly-Corrugated Rectangular Diaphragms Using the Rayleigh Ritz Method," IEEE/ASME Journal of Microelectromechanical Systems, vol. 9, pp. 399-406, September 2000. Refereed Conference Papers (1) M. Niu, F. von Preissig and E.S. Kim, "Partially Etched Holes for Residual Stress Release in Diaphragm-Based Pressure Sensors," International Mechanical Engineering Congress and Exposition, Symposium on Microelectromechanical Systems (Orlando, FL), November 5-10, 2000, MEMS-Vol. 2, pp. 227-232. (2) M. Niu and E.S. Kim, "Residual Stress Effect on Performance of Diaphragm-Based MEMS Pressure Transducers," International Mechanical Engineering Congress and Exposition, Symposium on Microelectromechanical Systems (Orlando, FL), November 5-10, 2000, MEMS-Vol. 2, pp. 269-274. (3) C.-H. Han and E.S. Kim, "Packaged Parylene-Diaphragm Piezoelectric Microspeaker," International Mechanical Engineering Congress and Exposition, Symposium on Microelectromechanical Systems (Orlando, FL), November 5-10, 2000, MEMS-Vol. 2, pp. 111-115. (4) C.-H. Han and E.S. Kim, "Micromachined Piezoelectric Ultrasonic Transducers Based on Parylene Diaphragm in Silicon Substrate," IEEE International Ultrasonics Symposium (San Juan, Puerto Rico), October 22-25, 2000, pp. 919-923. (5) S.H. Yi, F. von Preissig and E.S. Kim, "The Effects of Process Conditions on the Residual Stress and Composition of Electroless Nickel Films for MEMS," 197th ECS Meeting (Toronta, Canada), May 14-18, 2000, Proceedings to be published in Fall 2000. (6) F. von Preissig and E.S. Kim, "Topics in Finite-Element Modeling of Piezoelectric MEMS Devices," Third International Conference on Modeling and Simulation of Microsystems, San Diego, CA, March 27-29, 2000, pp. 269-272. (7) V. Vivek, Y. Zeng and E.S. Kim, "Novel Acoustic-Wave Micromixer," IEEE International Micro Electro Mechanical Systems Conference, Miyazaki, Japan, January 23-27, 2000, pp. 668-673. (8) C.-H. Han and E.S. Kim, "Parylene-Diaphragm Piezoelectric Acoustic Transducers," IEEE International Micro Electro Mechanical Systems Conference, Miyazaki, Japan, January 23-27, 2000, pp. 148-152. 1999 Refereed Journal Papers (1) B. Lee and E.S. Kim, "A Simple and Efficient Method of Analyzing Mechanical Behaviors of Multi-layered Orthotropic Plates in Rectangular Shape," Journal of Micromechanics and Microengineering, vol. 9, pp. 385-393, December 1999. Refereed Conference Papers (1) M. Niu, H. Zeng, H. Yan and E.S. Kim, "Extensive Experimental Study on Diaphragm-Based Piezoelectric Microphone," International Mechanical Engineering Congress and Exposition, Symposium on Microelectromechanical Systems (Nashville, TN), November 14-19, 1999, MEMS-Vol. 1, pp. 209-213. (2) C.-H. Han and E.S. Kim, "Micromachined Piezoelectric Ultrasonic Transducers on Dome-Shaped-Diaphragm in Silicon Substrate," IEEE International Ultrasonics Symposium (Lake Tahoe, NV), October 17-21, 1999, pp. 1167-1172. (3) H. Wang and E.S. Kim, "Ejection Characteristics of Micromachined Acoustic-Wave Liquid Ejector," Transducers '99, IEEE International Conference on Solid-State Sensors and Actuators (Sendai, Japan), June 7-10, 1999, pp. 1784-1787. (4) C.-H. Han and E.S. Kim, "Fabrication of Dome-Shaped Diaphragm with Circular Clamped Boundary on Silicon Substrate," IEEE International Micro Electro Mechanical Systems Conference, Orlando, FL, January 17-21, 1999, pp. 505-510. 1998 Refereed Journal Papers (1) C.-H. Han and E.S. Kim, "Study of Self-Limiting Etching Behavior in Wet Isotropic Etching of Silicon," Japanese Journal of Applied Physics, vol. 37, pp. 6939-6941, December 1998. (2) F. von Preissig, H. Zeng and E.S. Kim, "Measurement of Piezoelectric Strength in ZnO Thin Films for MEMS Applications," Journal of Smart Materials and Structures, vol. 7, pp. 396-403, June 1998. (3) X. Zhu and E.S. Kim, "Microfluidic Motion Generation with Acoustic Waves," Sensors and Actuators: A. Physical, vol. 66/1-3, pp. 355-360, April 1998. Refereed Conference Papers (1) H. Yan, K.C. Lou, B.C. Lee and E.S. Kim, "Analysis on Multi-layered, Corrugated Diaphragm with Residual Stress," ASME International Mechanical Engineering Congress and Exposition, Symposium on Microelectromechanical Systems (Anaheim, CA), November 15-20, 1998, DSC-Vol. 66, pp. 373-378. (2) C.-H. Han and E.S. Kim, "Study of Self-Limiting Etching Behavior in Wet Isotropic Etching of Silicon," International Microprocess and Nanotechnology Conference, Kyoungju, Korea, July 13-16, 1998. (3) H. Lakdawala and E.S. Kim, "Simple Post-Processing Technique to Tune Resonant Frequency of Film Bulk Acoustic Resonators and Stacked Crystal Filters," IEEE International Frequency Control Symposium (Pasadena, CA), May 27-29, 1998, pp. 831-835. (4) F. von Preissig, H. Zeng, and E.S. Kim, "Test Methods for Characterizing Piezoelectric Thin Films," MRS 1998 Spring Meeting (San Francisco, CA), April 13-17, 1998, Symposium Proceedings Vol. 518, pp. 117-122. 1997 Refereed Conference Papers (1) H. Keiner, F. von Preissig, H. Zeng, M. Nejhad and E.S. Kim, "Advanced Bulge Test System," MRS 1997 Fall Meeting (Boston, MA), December 1-5, 1997, Syposium Proceedings Vol. 505, pp. 229-234. (2) X. Zhu and E.S. Kim, "Acoustic-Wave Liquid Mixer," ASME International Mechanical Engineering Congress and Exposition, Symposium on Mechanics in Micro-Electro-Mechanical Systems (Dallas, TX), November 16-21, 1997, DSC-Vol. 62, pp. 35 - 38. (3) K.C. Lou, X. Zhu, H. Lakdawala and E.S. Kim, "Study on Etch Front of Piezoelectric ZnO Film and New Step Coverage Technique," IEEE International Ultrasonics Symposium (Toronto, Canada), October 5-8, 1997, pp. 565-568. (4) X. Zhu and E.S. Kim, "Microfluidic Motion Generation with Loosely-Focused Acoustic Waves," Transducers '97, IEEE International Conference on Solid-State Sensors and Actuators (Chicago, IL), June 16-19, 1997, pp. 837-838. 1996 Refereed Conference Papers (1) H. Yan and E.S. Kim, "Corrugated Diaphragm for Piezoelectric Microphone," the 5th IEEE International Conference on Emerging Technologies and Factory Automation, Kauai, HI, November 18-21, 1996, pp. 503-506. (2) F. von Preissig, H. Zeng and E.S. Kim, "New Methods of Measuring Key Elastic-Piezoelectric Constant of Thin Films," ASME Winter Annual Meeting, Symposium on Mechanics in Micro-Electro-Mechanical Systems (Atlanta, GA), November 17-22, 1996, DSC-Vol. 59, pp. 307-312. (3) W.W. Lau, Y. Song and E.S. Kim, "Lateral-Field-Excitation Acoustic Resonators for Monolithic Oscillators and Filters," IEEE International Frequency Control Symposium, Honolulu, HI, June 5 - 7, 1996, pp. 558-562. (4) Y.L. Huang, H. Zhang, E.S. Kim, S.G. Kim and Y.B. Jeon, "Piezoelectrically Actuated Microcantilever for Actuated Mirror Array Application," Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 2 - 6, 1996, pp. 191-195. (5) X. Zhu, E. Tran, W. Wang, E.S. Kim and S.Y. Lee, "Micromachined Acoustic-Wave Liquid Ejector," Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 2 - 6, 1996, pp. 280-282. 1995 Refereed Journal Papers (1) E. Tran, E.S. Kim and S.Y. Lee, "Fabrication of Mesas and Octagonal Cones in Silicon by Wet Chemical Etching," Journal of Micromechanics and Microengineering, vol. 5, pp. 251-256, September 1995. (2) Y. Song, E.S. Kim and A. Kapila, "Thermal Stability of Sputter-Deposited ZnO Thin Films," TMS/IEEE Journal of Electronic Materials, vol. 24, pp. 83-86, February 1995. Refereed Conference Papers (1) S.Y. Lee, Y.K. Kwong, E.S. Kim and E. Tran, "Local Thermal Decoupling Using Silicon Micromachining," The 1995 March Meeting of American Physical Society (San Jose, CA), March 20-24, 1995. (2) H. Zhang and E.S. Kim, "Dome-Shaped Diaphragm Microtransducers," MEMS '95, IEEE International Workshop on Micro Electro Mechanical Systems (Amsterdam, Netherlands), Jan. 29 - Feb. 2, 1995, pp. 256-260. 1994 Refereed Journal Papers (1) A.D. Sathe and E.S. Kim, "Deposition of Thin Film ZnO with Characteristics Close to Bulk Crystal ZnO," Integrated Ferroelectrics, vol. 5, pp. 245-254, November 1994. Refereed Conference Papers (1) Y. Huang and E.S. Kim, "Ultrasonic Agitation During Sputter Deposition of Thin Film," ASME Winter Annual Meeting, Symposium on Mechanics of Materials Processing and Manufacturing (Chicago, IL), November 6-11, 1994, AMD-Vol. 194, pp. 13-18. 1993 Refereed Journal Papers (1) A.K. Aggarwal and E.S. Kim, "Comments on 'Modeling of Quantum-Well Lasers for Computer-Aided Analysis of Optoelectronic Integrated Circuits'," IEEE Journal of Quantum Electronics, vol. 29, p. 2414, August 1993. Refereed Conference Papers (1) A.D. Sathe and E.S. Kim, "Techniques to Control Residual Stress in ZnO Thin Films," Transducers '93, IEEE International Conference on Solid-State Sensors and Actuators (Yokohama, Japan), June 7-10, 1993, pp. 158-161. Related Publications (1) R.P. Ried, E.S. Kim, D.M. Hong and R.S. Muller, "Piezoelectric Microphone with On-Chip CMOS Circuits," IEEE/ASME Journal of Microelectromechanical Systems, vol. 2, pp. 111-120, September 1993. (2) R.P. Ried, E.S. Kim, D.M. Hong and R.S. Muller, "Residual-Stress Compensation in Clamped-Clamped Micromachined Plates," ASME Winter Annual Meeting, Symposium on Micro-Mechanical Systems (Anaheim, CA), November 8-13, 1992, DSC-Vol. 40, pp. 23 - 32. (3) E.S. Kim, R.S. Muller and R.S. Hijab, "Front-to-Backside Alignment Using Resist-Patterned Etch Control and One Etching Step," IEEE/ASME Journal of Microelectromechanical Systems, vol. 1, pp. 95-99, June 1992. (4) E.S. Kim, J.R. Kim and R.S. Muller, "Improved IC-Compatible Piezoelectric Microphone and CMOS Process," Transducers '91, IEEE International Conference on Solid-State Sensors and Actuators (San Francisco, CA), June 23-27, 1991, pp. 270-273. (5) R.A. Stewart, J.R. Kim, E.S. Kim, R.M. White and R.S. Muller, "Young's Modulus and Residual Stress of LPCVD Silicon-rich Silicon Nitride Determined from Membrane Deflection," Sensors and Materials, vol. 2, pp. 285-298, May 1991. (6) E.S. Kim, R.S. Muller and P.R. Gray, "Integrated Microphone with CMOS Circuits on A Single Chip," IEEE International Electron Devices Meeting (Washington, D.C.), Dec. 3-6, 1989, pp. 880-883. (7) E.S. Kim and R.S. Muller, "IC-Processed Piezoelectric Microphone," IEEE Electron Device Letters, vol. EDL-8, No.10, pp. 467-468, Oct. 1987. (8) E.S. Kim and R.S. Muller, "Piezoelectric Readout Miniature Microphone," Proc. International Symposium on Microelectronics (Minneapolis, MN), Sept. 28-30, 1987, pp. 290-295. (9)
E.S.
Kim and R.S. Muller, "Micromachined ZnO on Silicon Nitride Pressure Sensor," IEEE
International Electron Devices Meeting (Los Angeles, CA), Dec. 7-10, 1986,
pp. 807-808. |
|
|
|
