Research

Area

Microspeaker

 

 

Microspeaker

(Click the image to see the demo video )

 

 
 

Refer to:
S.H. Yi and E.S. Kim, "Piezoelectric Microspeaker with Compressive Nitride Diaphragm," International MEMS Conference, January 20-24, 2002, Las Vegas, NV, pp. 260-263