Publications
2024
Refereed Journal Papers
(1) J. Lee, Y. Tang, X. Chen, J.F. Zhong and E.S. Kim, “Contactless Single Cell Extraction from Monolayer Cell Culture Using A MEMS Acoustic Droplet Ejector,” IEEE Transactions on Biomedical Engineering, Early Access, 10.1109/TBME.2024.3447715.
Refereed Conference Papers
(1) B. Neff, K. Sadeghian Esfahani, A. Roy, M. Barekatain, and E.S. Kim, “Translation and Electrically Controlled Rotation of Large Zebrafish Embryo by Acoustic Tweezers,” Hilton Head Workshop 2024: A Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head Island, SC, June 2 - 6, 2024, pp. 101 - 104.
(2) J. Wang, A. Zhang, D. Cantini, and E.S. Kim, “Non-Resonant Vibration Energy Harvester for Sub-Hertz and Sub-G Vibration,” Hilton Head Workshop 2024: A Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head Island, SC, June 2 - 6, 2024, pp. 386 - 389.
(3) A. Sengupta, A. Roy, H. Gao, M. Barekatain, H. Liu and E.S. Kim, “Wearable Stethoscope Based on Resonant Microphone Array with Wireless Data Transfer,” The 37th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2024), Austin, TX, January 21-25, 2024, pp. 101 - 104. Outstanding Student Paper Award Finalist.
(4) B. Neff, A. Roy, K. Sadeghian Esfahani and E.S. Kim, "Mixing, Trapping, and Ejection of Single Microparticle with Size and Material Selectivity using Acoustic Tweezers,” The 37th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2024), Austin, TX, January 21-25, 2024, pp. 340 - 343.
(5) K. Sadeghian Esfahani, B. Neff, A. Roy, M. Barekatain and E.S. Kim, “3D Fluorescence Imaging of Late-Stage Zebrafish Embryo with Acoustic Tweezers,” The 37th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2024), Austin, TX, January 21-25, 2024, pp. 344 - 347.
2023
Refereed Journal Papers
(1) H. Liu, M. Barekatain, A. Roy, S. Liu, Y. Cao, Y. Tang, A. Shkel and E.S. Kim, “MEMS Piezoelectric Resonant Microphone Array for Lung Sound Classification,” Journal of Micromechanics and Microengineering, Vol. 33, No. 4, 044003, 2023.
Refereed Conference Papers
(1) J. Lee, K. Sadeghian Esfahani, M. Barekatain and E.S. Kim, “Lens-Less Acoustic Tweezers Based on Spiral-Arm Vortex-Beam Transducers Capable of Levitating, Trapping, and Manipulating Large and Heavy Particles,” Transducers '23, The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Kyoto, Japan, June 25 - 29, 2023, pp. 405 - 408.
(2) A. Roy, M. Barekatain, J. Lee, B. Neff and E.S. Kim, “Wireless Acoustic Airborne Jet Propeller,” Transducers '23, The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Kyoto, Japan, June 25 - 29, 2023, pp. 753 - 756.
(3) M. Barekatain, J. Wang, A. Roy, K. Sadeghian Esfahani, J. Lee and E.S. Kim, “Non-Resonant Vibration Energy Harvester with Wound Micro-Coil Arrays,” Transducers '23, The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Kyoto, Japan, June 25 - 29, 2023, pp. 1272 - 1275.
(4) B. Neff, K. Sadeghian Esfahani, M. Barekatain, A. Roy, J. Lee and E.S. Kim, “Late-Stage Zebrafish Embryo Manipulation and Imaging with Acoustic Tweezers Based on Bessel Beam Trapping,” Transducers '23, The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Kyoto, Japan, June 25 - 29, 2023, pp. 1325 - 1328.
(5) J. Lee, K. Sadeghian Esfahani, and E.S. Kim, “Vortex-Beam Acoustic Transducer for Underwater Propulsion,” The 36th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2023), Munich, Germany, January 15-19, 2023, pp. 977 - 980.
2022
Refereed Journal Papers
(1) M. Barekatain, H. Liu, and E.S. Kim, “Wireless and Battery-less Tamper Detection with Pyroelectric Energy Converter and High-overtone Bulk Acoustic Resonator,”IEEE Sensors Journal, 2022, doi: 10.1109/JSEN.2022.3182940.
(2) Y. Tang and E.S. Kim, “Simple Sacrificial-Layer-Free Microfabrication Processes for Air-Cavity Fresnel Acoustic Lenses (ACFALS) With Improved Focusing Performance,” Microsystems & Nanoengineering, Volume 8, Article number: 75 (2022). https://doi.org/10.1038/s41378-022-00407-w.
Refereed Conference Papers
(1) K. Sadeghian Esfahani, Y. Tang, J. Lee, M. Barekatain, and E.S. Kim, “Underwater Acoustic Tweezers Capable of Trapping Large and Heavy Particles,” Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 5 - 9, 2022, pp. 43 - 46.
(2) H. Liu, A. Roy, Y. Tang, M. Barekatain and E.S. Kim, “Ultrasonic Air-Borne Propulsion Through Synthetic Jets,” Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 5 - 9, 2022, pp. 226 - 229.
(3) J. Lee and E.S. Kim, “Wireless and Stand-Alone Submarine Propeller Based on Acoustic Propulsion,” Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 5 - 9, 2022, pp. 230 - 233.
2021
Textbook
(1) “Fundamentals of Microelectromechanical Systems (MEMS),” E.S. Kim, Published April 2021 by McGraw Hill, Edition: 1, ISBN: 9781264257584, Format: Print, Pages: 416. Errata and Instructor Resources Under Downloads and Resources
Refereed Journal Papers
(1) Y. Tang, L.-Y. Chen, A. Zhang, C.-P. Liao, M.E. Gross, and E.S. Kim, “In Vivo Non-Thermal, Selective Cancer Treatment with High-Frequency Medium-Intensity Focused Ultrasound,” IEEE Access, vol. 9, pp. 122051-122066, 2021.
(2) Y. Tang and E.S. Kim, “Nozzleless Acoustic Droplet Ejector with Electrically Tunable Droplet Size for Picking and Placing Semiconductor Chips,” IEEE/ASME Journal of Microelectromechanical Systems, vol. 30, no. 2, pp. 262-270, 2021.
Refereed and Invited Conference Papers
(1) J. Lee and E.S. Kim, “Phase Array Ultrasonic Transducer Based on a Flip Chip Bonding with Indium Solder Bump,” IEEE International Ultrasonics Symposium, Virtual Symposium, September 11 - 16, 2021, pp. 1-4, doi: 10.1109/IUS52206.2021.9593776.
(2) L. Zhao and E.S. Kim, “Subminiature Underwater Propeller with Electrical Controllability of Steering,” IEEE International Ultrasonics Symposium, Virtual Symposium, September 11 - 16, 2021, pp. 1-4, doi: 10.1109/IUS52206.2021.9593504.
(3) E.S. Kim, “Wearable and Wireless Respiratory Monitoring System,” Keynote Lecture at the 2021 IEEE International Symposium on Next-Generation Electronics (ISNE 2021), Changsha, China, July 10-11, 2021.
2020
Refereed Journal Papers
(1) H. Liu, S. Liu, A.A. Shkel and E.S. Kim, “Active Noise Cancellation with MEMS Resonant Microphone Array,” IEEE/ASME Journal of Microelectromechanical Systems, vol. 29, no. 5, pp. 839-845, 2020.
(2) Y. Tang and E.S. Kim, “Ring-Focusing Fresnel Acoustic Lens for Long Depth-of-Focus Focused Ultrasound and Multiple Trapping Acoustic Beams,” IEEE/ASME Journal of Microelectromechanical Systems, vol. 29, no. 5, pp. 692-698, 2020.
(3) L. Zhao and E.S. Kim, “Analytical Dual-Charged-Surfaces Model for Permanent Magnet and Its Application in Magnetic Spring,” IEEE Transactions on Magnetics, vol. 56, no. 9, pp. 1 – 7, 2020.
Refereed Conference Papers
(1) S. Chang, Y. Tang and E.S. Kim, “Low Intensity Focused-Ultrasound Stimulation on Hippocampal Neurons in Rat Brain Slices with Self-Focusing Acoustic Transducer,” The 12th Scientific Meeting for the Asian Australasian Society of Stereotactic and Functional Neurosurgery, Gyeongju, Korea, September 17 –19, 2020.
(2) Y. Tang, S. Liu and E.S. Kim, “MEMS Focused Ultrasonic Transducer with Air-Cavity Lens Based on Polydimethylsiloxane (PDMS) Membrane,” The 33rd IEEE International Conference on Micro Electromechanical Systems (MEMS 2020), Vancouver, Canada, January 18-22, 2020, pp. 58 – 61.
(3) H. Liu, S. Liu and E.S. Kim, “Multi-Band MEMS Resonant Microphone Array for Continuous Lung-Sound Monitoring and Classification,” The 33rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2020), Vancouver, Canada, January 18-22, 2020, pp. 857 – 860. Outstanding Student Paper Award Nominee.
(4) K. Dixit, P. Ghelich, L. Zhao, E.S. Kim, and M. Han, "A Chronic Assembly for an Implantable Focused Ultrasound Stimulator in the Rat Spinal Cord," in North American Neuromodulation Society Annual Conference, Las Vegas, NV, January 23–26, 2020, Program No. PS7.
2019
Refereed Journal Papers
(1) A. Shkel and E.S. Kim, “Continuous Health Monitoring with Resonant-Microphone-Array-Based Wearable Stethoscope,” IEEE Sensors Journal, vol. 19, no. 12, pp. 4629-4638, 2019.
Refereed Conference Papers
(1) H. Liu, S. Liu, A. Shkel, Y. Tang, and E.S. Kim, “MEMS Resonant Microphone Array for Lung Sound Classification,” IEEE International Electron Devices Meeting, San Francisco, CA, December 9 - 11, 2019, pp 811-814.
(2) Y. Tang and E.S. Kim, “Acoustic Droplet-Assisted Particle Ejection through and from Agarose-gel-filled Petri Dish,” IEEE International Ultrasonics Symposium, Glasgow, UK, October 6 - 9, 2019, pp. 64-67.
(3) L. Zhao and E.S. Kim, “Acoustic Tweezers with Electrical Controllability on Rotation of Trapped Particle,” IEEE International Ultrasonics Symposium, Glasgow, UK, October 6 - 9, 2019, pp. 663-666.
(4) Y. Tang and E.S. Kim, “Acoustic Propeller Based on Air Jets from Acoustic Streaming,” Transducers '19, The 20th International Conference on Solid-State Sensors, Actuators and Microsystems, Berlin, Germany, June 23 - 27, 2019, pp. 2068 – 2071.
(5) L. Zhao and E.S. Kim, “Acoustic Tweezers for Trapping Late-Stage Zebrafish Embryos,” The 32nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2019), Seoul, Korea, January 27 - 31, 2019, pp. 57 – 60.
(6) Y. Tang and E.S. Kim, “Acoustic Tweezers Based on Linear Fresnel Lens with Air Cavities for Large Volume Particle Trapping,” The 32nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2019), Seoul, Korea, January 27 - 31, 2019, pp. 763 - 766.
2018
Refereed Journal Papers
(1) L. Wang, A. Lin and E.S. Kim, “Miniature Sensing System with FBAR-based Oscillators and Frequency Shift,” IEEE Sensors Journal, vol. 18, no. 18, pp. 7633 – 7637, 2018.
Refereed Conference Papers
(1) L. Zhao and E.S. Kim, “Ultrasonic Propeller with Electrically Controllable Propulsion Direction,” IEEE International Ultrasonics Symposium, Kobe, Japan, October 22 - 25, 2018, pp. 1-3, doi: 10.1109/ULTSYM.2018.8580114.
(2) L. Zhao and E.S. Kim, “Focused Ultrasonic Transducer with Electrically Controllable Focal-Point Location,” IEEE International Ultrasonics Symposium, Kobe, Japan, October 22 - 25, 2018, pp. 1-3, doi: 10.1109/ULTSYM.2018.8580054.
(3) Y. Tang and E.S. Kim, “Electrical Tuning of Focal Size with Single Focused Ultrasonic Transducer,” IEEE International Ultrasonics Symposium, Kobe, Japan, October 22 - 25, 2018, pp. 1-4, doi: 10.1109/ULTSYM.2018.8579883.
(4) A. Shkel, M. Barekatain and E.S. Kim, “FBAR-Based Sensor for Wireless RFID Authentication of Integrated Circuits,” Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 3 -7, 2018, pp. 190 - 193.
(5) L. Zhao and E.S. Kim, "Focused Ultrasound Transducer with Electrically Controllable Focal Length,” The 31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2018), Belfast, UK, January 21 - 25, 2018, pp. 245 - 248.
(6) L. Zhao and E.S. Kim, "Acoustic Tweezers for Sub-mm Microparticle Manipulation,” The 31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2018), Belfast, UK, January 21 - 25, 2018, pp. 1088 – 1091.
2017
Refereed Journal Papers
(1) Y. Wang, Q. Zhang, L. Zhao and E.S. Kim, “Non-Resonant, Electromagnetic Broad-Band Vibration-Energy Harvester Based on Self-Assembled Ferrofluid Liquid Bearing,” IEEE/ASME Journal of Microelectromechanical Systems, vol. 26, no. 4, pp. 809 – 819, 2017.
Refereed Conference Papers
(1) A. Shkel and E.S. Kim, “Wearable Low-Power Wireless Lung Sound Detection Enhanced by Resonant Transducer Array for Pre-Filtered Signal Acquisition,” Transducers '17, The 19th International Conference on Solid-State Sensors, Actuators and Microsystems, Kaohsiung, Taiwan, June 18 - 22, 2017, pp. 842 - 845.
(2) Y. Tang, L. Wang, Y. Wang and E.S. Kim, "On-Demand, Heatless Ejection of Millimeter-Sized Liquid Droplets,” The 30th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2017), Las Vegas, NV, January 22 - 26, 2017, pp. 1196 - 1199.
2016
Refereed Journal Papers
(1) Y. Wang, Q. Zhang, L. Zhao, Y. Tang, A. Shkel and E.S. Kim, “Vibration Energy Harvester with Low Resonant Frequency Based on Flexible Coil and Liquid Spring,” Applied Physics Letter, 109, 203901 (2016); doi: 10.1063/1.4967498.
(2) S. Cong, Y. Cao, X. Fang, Y. Wang, Q. Liu, H. Gui, C. Shen, X. Cao, E.S. Kim, and C. Zhou, “Carbon Nanotube Macroelectronics for Active Matrix Polymer-Dispersed Liquid Crystal Displays,” ACS Nano, 10 (11), pp. 10068–10074, 2016.
(3) Q. Zhang, Y. Wang, L. Zhao and E.S. Kim, “Integration of Microfabricated Low Resistance and Thousand-turn Coils for Vibration Energy Harvesting,” Journal of Micromechanics and Microengineering, vol. 26, no. 2, 025019 (10pp), 2016.
(4) Q. Zhang and E.S. Kim, “Microfabricated Electromagnetic Energy Harvesters with Magnet and Coil Arrays Suspended by Silicon Springs,” IEEE Sensors Journal, vol. 16, no. 3, pp. 634 - 641, 2016.
Refereed Conference Papers
(1) A. Shkel and E.S. Kim, “Helmholtz PMUT: Demonstrating Passive Amplification in Microfabricated Acoustic Transducers,” Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 5 -9, 2016, pp. 60 - 61.
(2) Y. Wang, L. Zhao, A. Shkel, Y. Tang and E.S. Kim, " Vibration Energy Harvester Based on Floating Magnet for Generating Power from Human Movement,” Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 5 -9, 2016, pp. 404 - 407.
(3) Y. Tang, Y. Wang, L. Zhao, A. Shkel and E.S. Kim, “Micromachined Piezoelectric Ultrasonic Transducer Based on Dome-Shaped Diaphragm Supported by Flat Square Diaphragm,” The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2016), Shanghai, China, January 24 - 28, 2016, pp. 1110 - 1113.
(4) Y. Wang, Q. Zhang, L. Zhao, A. Shkel, Y. Tang and E.S. Kim, “Stackable Dual-Layer Coil Based on Wafer-Level Transfer Technique for Electromagnetic Energy Harvester,” The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2016), Shanghai, China, January 24 - 28, 2016, pp. 1264 - 1267.
2015
Refereed Journal Papers
(1) D.A. Thomas, L. Wang, B. Goh, E.S. Kim, J. L. Beauchamp, “Mass Spectrometric Sampling of a Liquid Surface by Nanoliter Droplet Generation from Bursting Bubbles and Focused Acoustic Pulses: Application to Studies of Interfacial Chemistry,” Analytical Chemistry, vol. 87, no. 6, pp 3336–3344, 2015.
(2) Q. Zhang, Y. Wang and E.S. Kim, “Electromagnetic Energy Harvester with Flexible Coils and Magnetic Spring for 1 – 10 Hz Resonance,” IEEE/ASME Journal of Microelectromechanical Systems, vol. 24, no. 4, pp. 1193-1206, 2015.
(3) Q. Zhang and E.S. Kim, “Micromachined Energy-Harvester Stack with Enhanced Electromagnetic Induction through Vertical Integration of Magnets,” IEEE/ASME Journal of Microelectromechanical Systems, vol. 24, no. 2, pp. 384 - 394, 2015.
Refereed Conference Papers
(1) A. Shkel and E.S. Kim, “Acoustic Micro-resonator Utilizing Hemispherical Air Cavity for Sensitivity Enhancement,” IEEE International Ultrasonics Symposium, DOI 10.1109/ULTSYM.2015.0359, Taipei, Taiwan, October 21 - 24, 2015.
(2) Y. Wang, Q. Zhang, L. Zhao and E.S. Kim, “Non-Resonant, Broad-Band Vibration-Energy Harvester Based on Self-Assembled Liquid Bearing,” Transducers '15, The 18th International Conference on Solid-State Sensors, Actuators and Microsystems, Anchorage, AK, June 21 - 25, 2015 , pp. 614 - 617.
(3) A. Vafanejad and E.S. Kim, “Effect of Diaphragm Perforation on Quality Factor of Hemispherical Resonance Gyroscope,” Transducers '15, The 18th International Conference on Solid-State Sensors, Actuators and Microsystems, Anchorage, AK, June 21 - 25, 2015 , pp. 27 - 30.
(4) Q. Zhang, Y. Wang, L. Zhao and E.S. Kim, “Microfabricated Thousand-Turn Coils for mW Power Generation from Sub-mm Vibrations,” Transducers '15, The 18th International Conference on Solid-State Sensors, Actuators and Microsystems, Anchorage, AK, June 21 - 25, 2015 , pp. 606 - 609.
(5) Q. Zhang and E.S. Kim, “Fully-Microfabricated Electromagnetically-Actuated Membrane for Microspeaker,” Transducers '15, The 18th International Conference on Solid-State Sensors, Actuators and Microsystems, Anchorage, AK, June 21 - 25, 2015 , pp. 2125 - 2128.
(6) Y. Wang, Q. Zhang, L. Zhao and E.S. Kim, “Ferrofluid Liquid Spring for Vibration Energy Harvesting,” IEEE MEMS’15, Estoril, Portugal, January 18-22, 2015, pp. 122-125.
(7) A. Shkel, L. Baumgartel, and E.S. Kim, “A Resonant Piezoelectric Microphone Array For Detection Of Acoustic Signatures In Noisy Environments,” IEEE MEMS’15, Estoril, Portugal, January 18-22, 2015, pp. 917-920.
2014
Refereed Journal Papers
(1) Q. Zhang and E.S. Kim, “Vibration Energy Harvesting Based on Magnet and Coil Arrays for Watt-Level Handheld Power Source,” Proceedings of the IEEE, vol. 102, no. 11, pp. 1747 – 1761, 2014.
(2) Q. Zhang, Y. Wang, and E.S. Kim, “Power Generation from Human Body Motion through Magnet and Coil Arrays With Magnetic Spring,” Journal of Applied Physics, vol. 115064908 (5pp), 2014.
(3) Y. Choe, S.-J. Chen and E.S. Kim, “Peptide Synthesis on Glass Substrate Using Acoustic Droplet Ejector,” IEEE Transactions on Biomedical Engineering, vol. 61, no. 3, pp. 705-710, March 2014. Selected to be one of the journal’s three featured articles in March 2014
Refereed Conference Papers
(1) A. Vafanejad and E.S. Kim, "Sub-Degree Angle Detection Using Micromachined Dome-Shaped-Diaphragm Resonator With Wine-Glass Mode Vibration,” Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 8 -12, 2014, pp. 391 - 394.
2013
Refereed Journal Papers
(1) S.C. Ur, E.S. Kim, and S.H. Yi, “The Effects of Residual Stresses in the Composite Diaphragm on the Performance of Piezoelectric Microspeakers,” Electronic Materials Letters, vol. 9, no. 1, pp. 119-123, 2013
(2) Y. Choe and E.S. Kim, “Valveless Micropump Driven by Acoustic Streaming,” Journal of Micromechanics and Microengineering, vol. 23, 045005 (8pp), 2013.
(3) L. Wang, Y.-J. Li, A. Lin, Y. Choe, M.E. Gross, and E.S. Kim, “A Self Focusing Acoustic Transducer that Exploits Cytoskeletal Differences for Selective Cytolysis of Cancer Cells,” IEEE/ASME Journal of Microelectromechanical Systems, vol. 22, no 3, pp. 542-552, 2013.
(4) K.H. Lam, H.-S. Hsu, Y.Li, C. Lee, A. Lin, Q. Zhou, E.S. Kim, K.K. Shung, “Ultrahigh Frequency Lensless Ultrasonic Transducers for Acoustic Tweezers Application,” Biotechnology and Bioengineering, vol. 110, no. 3, pp. 881-886, 2013.
(5) L. Baumgartel, A. Vafanejad, S.-J. Chen, and E.S. Kim, “Resonance Enhanced Piezoelectric Microphone Array for Broadband or Pre-filtered Acoustic Sensing,” IEEE/ASME Journal of Microelectromechanical Systems, vol. 22, pp. 107-114, 2013.
(6) F. Yu, J. Lee, N. Jen, X. Li, Q. Zhang, R.Tang, Q.Zhou, E.S. Kim, T.K.Hsiai, “Elevated Electrochemical Impedance in the Endoluminal Regions with High Shear Stress: Implication for Assessing Lipid-rich Atherosclerotic Lesions,” Biosensors and Bioelectronics, vol. 43, pp. 237-244, 2013.
Refereed Conference Papers
(1) A. Vafanejad and E.S. Kim, "Dome-Shaped-Diaphragm Resonators with Wine-Glass Mode Vibration,” 10th International Workshop on Nanomechanical Sensing, Stanford, CA, May 1 - 3, 2013, pp. 171-172.
(2) L. Wang, C.-P. Liao, M. Gross, and E.S. Kim, "Self Focusing Acoustic Transducer (SFAT) with 10 mm Focal Length for Cancer-Specific Localized Cytolysis of 3D Cell Spheroids in 3D Matrigel,” Transducers '13, The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, Barcelona, Spain, June 16 - 20, 2013, pp. 653-656.
(3) Y. Choe, L. Wang, and E.S. Kim, "In Situ Protein Synthesis on Glass Substrate with Acoustic Microdroplet Ejector with Air-Cavity Lens Formed by Micromachined Silicon," Transducers '13, The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, Barcelona, Spain, June 16 - 20, 2013, pp. 325-328.
(4) Q. Zhang and E.S. Kim, "Energy Harvesters with High Electromagnetic Conversion Efficiency through Magnet and Coil Arrays," IEEE International Micro Electro Mechanical Systems Conference, Taipei, Taiwan, January 20–24, 2013, pp. 110 - 113.
2012
Refereed Journal Papers
(1) S.-J. Chen, Y. Choe, L. Baumgartel, A. Lin, and E.S. Kim, “Edge-released, Piezoelectric MEMS Acoustic Transducers in Array Configuration,” Journal of Micromechanics and Microengineering, vol. 22, 025005 (2012).
(2) W. Pang, H. Zhao, E.S. Kim, H. Zhang, and H. Yu, “Piezoelectric Microelectromechanical Resonant Sensors for Chemical and Biological Detection,” Lab on a Chip, vol. 12, pp. 29-44, 2012.
Refereed Conference Papers
(1) L. Wang, Y. Li, A. Lin, Y. Choe, M. Gross, and E.S. Kim, "Combinatory Localized Cytolysis with Micron Precision by Acoustic Transducer Array for Fast Screening of Drug Induced Cytoskeleton Alteration," IEEE International Micro Electro Mechanical Systems Conference, Paris, France, Jan. 29 – Feb. 2, 2012, pp. 800-803.
2011
Refereed Journal Papers
(1) Y. Choe, J.W. Kim, K.K. Shung, and E.S. Kim, “Microparticle Trapping in An Ultrasonic Bessel Beam,” Applied Physics Letter, vol. 99, 233704 (2011).
(2) Z. Wang, X. Qiu, J. Zhu, J. Oiler, S.-J. Chen, J. Shi, E.S. Kim, and H. Yu, “Directional Acoustic Underwater Thruster,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency, vol.58, no.6, pp. 1114-1117, 2011.
(3) S.-J. Chen, C.Y. Lee, and E.S. Kim, “Integration of Piezoelectric Tunable Capacitors and Bonded-wire Inductors for Contactless RF Switch and Tunable Filter,” Sensors and Actuators A: Physical, vol. 165, no. 1, pp. 73-78, 2011.
Refereed Conference Papers
(1) E.S. Kim, “Piezoelectric microspeakers built on various diaphragms,” 162nd Meeting: Acoustical Society of America, San Diego, CA, Oct. 31 – Nov. 4, 2011, Invited.
(2) L. Wang, Y. Li, A. Lin, Y. Choe, M. Gross, and E.S. Kim, "Micro-localized Cell Lysis by Low Power Focused Acoustic Transducer," IEEE International Ultrasonics Symposium, Orlando, FL, October 18-21, 2011, pp. 1123-1126.
(3) A. Lin, Y. Li, L. Wang, S.J. Chen, M. Gross, and E.S. Kim, " Label-Free Detection of Prostate-Specific Antigen with FBAR-Based Sensor with Oriented Antibody Immobilization," IEEE International Ultrasonics Symposium, Orlando, FL, October 18-21, 2011, pp. 797-800.
(4) L. Wang, Y. Li, A. Lin, S.J. Chen, M. Gross, and E.S. Kim, "Cell Lysis by Low Power Focused Acoustic Transducer and Investigation of Acoustic Intensity Threshold for Cytolysis of Various Cell Lines," The 15th International Conference on Miniaturized Systems for Chemistry and Life Sciences (µTAS 2011), Seattle, WA, October 2 - 6, 2011, pp. 434-436.
(5) S.J. Chen, A. Lin, and E.S. Kim, "Frequency-multiplexed Combinatory Mass Sensing with Single Data Line from Multiple Integrated Film Bulk Acoustic Resonators," Transducers '11, IEEE International Conference on Solid-State Sensors and Actuators, Beijing, China, June 5 - 9, 2011, pp. 783-786.
(6) Y. Choe, L. Wang, and E.S. Kim, " On-chip Integration of Eight Directional Droplet Ejectors for Inking a Spot with Eight Droplets without Ejector Movement," Transducers '11, IEEE International Conference on Solid-State Sensors and Actuators, Beijing, China, June 5 - 9, 2011, pp. 2948-2951.
(7) L. Wang, Y. Choe, S. J. Chen, L. Baumgartel, and E.S. Kim, "MEMS Ultrasonic Transducers for Highly Sensitive Doppler Velocity Sensor for Low Velocity Measurement," Transducers '11, IEEE International Conference on Solid-State Sensors and Actuators, Beijing, China, June 5 - 9, 2011, pp. 719-722.
(8) Q. Zhang, S.J. Chen, L. Baumgartel, A. Lin, and E.S. Kim, "Microelectromagnetic Energy Harvester with Integrated Magnets," Transducers '11, IEEE International Conference on Solid-State Sensors and Actuators, Beijing, China, June 5 - 9, 2011, pp. 1657-1660.
(9) Y. Choe, J.W. Kim, K.K. Shung, and E.S. Kim, “Ultrasonic Microparticle Trapping by Multi-Foci Fresnel Lens,” Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum, San Francisco, CA, May 1-5, 2011, Digital Object Identifier: 10.1109/FCS.2011.5977900.
(10) S.J. Chen, A. Lin, and E.S. Kim, " Multiplexed Film Bulk Acoustic Resonators for Mass Sensing Applications," 2011 MRS Spring Meeting and Exhibit, San Francisco, CA, April 25 - 29, 2011, vol. 1348, CC03-04.
(11) L. Wang, Y. Choe, and E. S. Kim, "Electrical Control of Droplet Direction with Phase-Varied Fresnel Lens on Acoustic Wave Liquid Ejector," IEEE International Micro Electro Mechanical Systems Conference, Cancun, Mexico, January 23 – 27, 2011, pp. 1115-1118.
(12) Z. Wang, J. Zhu, X. Qiu, R. Tang, C. Yu, J. Oiler, E.S. Kim, and H. Yu, "Directional Acoustic Underwater Thruster," IEEE International Micro Electro Mechanical Systems Conference, Cancun, Mexico, January 23 – 27, 2011, pp. 1225-1228.
2010
Refereed Journal Papers
(1) H. Zhang, W. Pang and E. S. Kim, “Miniature High Frequency Longitudinal Wave Mass Sensors in Liquid,” IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, vol. 58, no. 1, pp. 255-258, 2010.
(2) H. Zhang, W. Pang, E. S. Kim and H. Yu, “Micromachined Silicon and Polymer Probes Integrated with Film Bulk Acoustic Resonator Mass Sensors,” Journal of Micromechanics and Microengineering, vol. 20, no. 12, pp. 125008 (9pp), 2010.
(3) W. Pang, H. Zhang, R.C. Ruby, H. Yu, and E.S. Kim, “Analytical and experimental study on the second harmonic mode of bulk acoustic wave resonator,” Journal of Micromechanics and Microengineering, vol. 20, no. 11, pp. 115015 (10pp), 2010.
(4) H. Zhang, W. Pang, M.S. Marma, C.Y. Lee, S. Kamal-Bahl, E.S. Kim, and C.E. McKenna, “Label-Free Detection of Protein-Ligand Interactions in Real Time Using Micromachined Bulk Acoustic Resonators,” Applied Physics Letter, vol. 96, no. 12, 123702, 2010.
(5) J. Zhu, C. Lee, E.S. Kim, D. Wu, C. Hu, Q. Zhou, K.K. Shung, and H. Yu, “High-overtone Self-Focusing Acoustic Transducers for High Frequency Ultrasonic Doppler,” Ultrasonics, vol. 50, no. 6, pp. 544-547, 2010.
(6) J. Lo, P. Butte, Q. Fang, S.-J. Chen, T. Papaioannou, E.S. Kim, M. Gundersen, and L. Marcu, “Multilayered MOEMS Tunable Spectrometer for Fluorescence Lifetime Detection,” IEEE Photonics Technology Letters, vol. 22, no. 7, pp. 486 – 488, 2010.
Refereed Conference Papers
(1) A. Lin, F.E. Sahin, P. Pham and E.S. Kim, “Real-Time Label-Free Detection of DNA Synthesis by FBAR-Based Mass Sensing,” IEEE International Ultrasonics Symposium, San Diego, CA, October 11 – 14, 2010, pp. 1286 - 1289.
(2) S.J. Chen, D. Chi, J.F. Lo, and E.S. Kim, “Arrayed, Piezoelectrically-Actuated Mirrors and Gratings for Spectrometer,”Technical Proceedings of the 2010 NSTI Nanotechnology Conference & Expo, Anaheim, CA, USA, June 21 – 25, 2010, vol. 2, pp. 312 – 315.
(3) S.J. Chen, Y. Choe, and E.S. Kim, “Frequency-Interleaved MEMS Ultrasound Transducer,” Technical Proceedings of the 2010 NSTI Nanotechnology Conference & Expo, Anaheim, CA, June 21 – 25, 2010, vol. 2, pp. 324 – 327.
(4) Y. Choe, S.J. Chen, and E.S. Kim, “High Fidelity Loud Microspeaker Based on PZT Bimorph Diaphragm,” Technical Proceedings of the 2010 NSTI Nanotechnology Conference & Expo, Anaheim, CA, June 21 – 25, 2010, vol. 2, pp. 316 – 319.
(5) E.S. Kim, “Acoustic MEMS Transducers for Biomedical Applications,” IEEE International Frequency Control Symposium, Newport Beach, CA, June 2 – 4, 2010, pp. 71 – 76, Invited.
(6) S.J. Chen, Y. Choe, and E.S. Kim, “Acoustic Transducers Built on Edge-Released MEMS Structures,” Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 6 – 10, 2010, pp. 234 – 237.
(7) L. Baumgartel and E.S. Kim, “Use of Compressively-stressed Zinc Oxide to Dramatically Increase Microspeaker Displacement,” 159th Meeting of the Acoustical Society of America, Baltimore, MD, April 19 – 23, 2010, Proceedings of Meetings on Acoustics, Vol. 9, 030001 (2010).
(8) Y. Choe, S.J. Chen, and E.S. Kim, “Bimorph Diaphragm Formed by Two PZT Sheets on Micromachined Silicon for Sound Generation,” 6th International Conference and Exhibition on Device Packaging, Scottsdale/Fountain Hills, AZ, March 9-11, 2010, pp. 269 – 270.
2009
Refereed Journal Papers
(1) J. Lo, S.-J. Chen, Q. Fang, T. Papaioannou, E.S. Kim, M. Gundersen and L. Marcu, “Performance of Diaphragmed Microlens for a Packaged Microspectrometer,” Sensors, vol. 9, no. 2, pp. 859-868, 2009.
(2) H. Yu, C. Lee, W. Pang, H. Zhang, A. Brannon, J. Kitching, and E.S. Kim, “HBAR-Based 3.6 GHz Oscillator with Low Power Consumption and Low Phase Noise,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency, vol. 56, no. 2, pp. 400 – 403, 2009.
Refereed Conference Papers
(1) L. Baumgartel and E.S. Kim, “Experimental Optimization of Electrodes for High Q, High Frequency HBAR,” IEEE International Ultrasonics Symposium, Rome, Italy, September 20-23, 2009, pp. 2107 - 2110.
(2) S.J. Chen, C.Y. Lee, and E.S. Kim, "Integration of Tunable Capacitors and Bonded-Wires for Contactless RF Switch and Tunable Filter," Transducers '09, IEEE International Conference on Solid-State Sensors and Actuators, Denver, CO, June 21 - 25, 2009, pp. 545 - 548.
(3) J. Zhu, X. Qiu, J. Oiler, C. Yu, Z. Wang, C. Lee, T.K. Hsiai, E.S. Kim, and H. Yu, "Localized Cell Lysis Using Self Focused Acoustic Transducers," Transducers '09, IEEE International Conference on Solid-State Sensors and Actuators, Denver, CO, June 21 - 25, 2009, pp. 608 - 611.
(4) A. Lin and E.S. Kim, "Selectivity and Long-term Reliability of Resonant Explosive-Vapor-Trace Detection Based on Antigen-Antibody Binding," IEEE International Micro Electro Mechanical Systems Conference, Sorrento, Italy, January 25 – 29, 2009, pp. 316 - 319.
(5) S.H. Yi, S.C. Ur, and E.S. Kim, "Performance of Packaged Piezoelectric Microspeakers Depending on the Material Propoerties," IEEE International Micro Electro Mechanical Systems Conference, Sorrento, Italy, January 25 – 29, 2009, pp. 765 - 768.
2008
Refereed Journal Papers
(1) C.Y. Lee, H. Yu, S.C. Hill, W. Pang, and E.S. Kim, “Airborne particle generation through acoustic ejection of particles-in-droplets,” Aerosol Science & Technology, vol. 42, no. 10, pp. 832-841, 2008.
(2) C.Y. Lee, W. Pang, H. Yu, and E.S. Kim, “Subpicoliter Droplet Generation Based on a Nozzle-free Acoustic Transducer,” Applied Physics Letters, vol. 93, 034104, 2008.
(3) C.Y. Lee, W. Pang, S. Chen, D. Chi, H. Yu, and E.S. Kim, “Surface Micromachined, Complementary-Metal-Oxide-Semiconductor Compatible Tunable Capacitor with 14:1 Continuous Tuning Range,” Applied Physics Letters, vol. 92, 044103, 2008.
(4) H. Yu, L. Ai, M. Rouhanizadeh, D. Patel, E.S. Kim, and T.K. Hsiai, “Flexible Polymer Sensors for In Vivo Intravascular Shear Stress Analysis,” IEEE/ASME Journal of Microelectromechanical Systems, vol. 17, no. 5, pp. 1178 – 1186, 2008.
(5) J.M. Cannata, J.A. Williams, Q.F. Zhou, L. Sun, K. K. Shung, H. Yu, and E.S. Kim, "Self-focused ZnO Transducers for Ultrasonic Biomicroscopy," Journal of Applied Physics, 103: 084109, 2008.
(6) C.Y. Lee, H. Yu, and E.S. Kim, “Droplet-Based Microreactions with Oil Encapsulation,” IEEE/ASME Journal of Microelectromechanical Systems, vol. 17, no. 1, pp. 147 - 156, 2008.
(7) Q. Zou, W. Tan, E.S. Kim and G.E. Loeb, “Single-axis and Tri-axis Piezoelectric Bimorph Accelerometer,” IEEE/ASME Journal of Microelectromechanical Systems, vol. 17, no. 1, pp. 45 – 57, 2008.
Refereed Conference Papers
(1) E.S. Kim, “Piezoelectric MEMS for Audio Signal Transduction, Microfluidic Management, Resonant Mass Sensing, and Movable Surface Micromachined Structures,” November 2-5, 2008, IEEE International Ultrasonics Symposium, Beijing, China, November 2-5, 2008, pp. 924 – 929, Invited.
(2) H. Yu, L. Ai, M. Rouhanizadeh, T. K. Hsiai, and E.S. Kim, “Flexible Shear Stress Sensor for In Vivo Cardiovascular Testing,” Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 1-5, 2008, June 1-5, 2008, pp. 142-145.
(3) C. Lee, S. Chen, D. Chi, H. Yu, and E.S. Kim, " Surface Micromachined GHz Tunable Capacitor with 14:1 Continuous Tuning Range," IEEE International Micro Electro Mechanical Systems Conference, Tucson, AZ, January 13 – 17, 2008, pp. 1008-1011.
(4) Lin, H. Yu, M. Waters, E.S. Kim, and S. D. Goodman, "Explosive Trace Detection with FBAR-Based Sensor," IEEE International Micro Electro Mechanical Systems Conference, Tucson, AZ, January 13 – 17, 2008, pp. 208-211.
2007
Refereed Journal Papers
(1) H. Zhang, M.S. Marma, S. Kamal-Bahl, E.S. Kim, and C.E. McKenna, “Sequence Specific Label-Free DNA Sensing Using Film-Bulk-Acoustic-Resonators,” IEEE Sensors Journal, vol. 7, no 12, pp. 1587-1588, 2007.
(2) H. Yu, W. Pang, H. Zhang and E.S. Kim, “Ultra Temperature-Stable Bulk-Acoustic-Wave Resonators with SiO2 Compensation Layer,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency, vol. 54, no. 10, pp. 2102 – 2109, 2007.
(3) C.Y. Lee, S. Kamal-Bahl, H. Yu, J.W. Kwon and E.S. Kim, “On-Demand DNA Synthesis on Solid Surface by Four Directional Ejectors on a Chip,” IEEE/ASME Journal of Microelectromechanical Systems, vol. 16, no. 5, pp. 1130-1139, 2007.
(4) W. Pang, H. Zhang, H. Yu and E.S. Kim, “Electrical Frequency Tuning of Film Bulk Acoustic Resonator,” IEEE/ASME Journal of Microelectromechanical Systems, vol. 16, no. 6, pp. 1303 – 1313, 2007.
(5) H. Zhang, M.S. Marma, E.S. Kim, C.E. McKenna and M.E. Thompson, ”Mercuric Ion Sensing by Film-Bulk-Acoustic-Resonator,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 54, pp. 1723-1725, 2007.
(6) Q.F. Zhou, C. Sharp, J.M. Cannata, K.K. Shung, G.H. Feng and E.S. Kim, ”Self-focusing High Frequency Ultrasonic Transducers Based on ZnO Piezoelectric Films,” Applied Physics Letters, vol. 90, 113502, 2007.
(7) H. Yu, Q. Zou, J.W. Kwon, D. Huang and E.S. Kim, “Liquid Needle,” IEEE/ASME Journal of Microelectromechanical Systems, vol. 16, no. 2, pp. 445 - 453, 2007.
Refereed Conference Papers
(1) H. Yu, C. Lee, W. Pang, H. Zhang, and E.S. Kim, " Low Phase Noise, Low Power Consuming 3.7 GHz Oscillator Based on High-overtone Bulk Acoustic Resonator," IEEE International Ultrasonics Symposium, New York, NY, October 29-31, 2007, pp. 1160 - 1163.
(2) H. Yu, D. Wu, C. Lee, Q. Zhou, E.S. Kim, and K.K. Shung, "High-overtone Self-Focusing Acoustic Transducer for High Frequency Ultrasonic Imaging," IEEE International Ultrasonics Symposium, New York, NY, October 29-31, 2007, , pp. 2401 - 2404.
(3) J. Cannata, J. Williams, Q. Zhou, H. Yu, E.S. Kim, and K. K. Shung, " Self-focused ZnO Transducers for Ultrasonic Biomicroscopy," IEEE International Ultrasonics Symposium, New York, NY, October 29-31, 2007, pp. 945 – 948.
(4) H. Yu, L. Ai, M. Rouhanizadeh, R. Hamilton, J. Hwang, E.S. Kim and T.K. Hsiai, “Flexible Catheter-Based Cardiovscular Shear Stress Sensor,” 2007 BMES Annual Fall Meeting, Los Angles, CA, September 26-29, 2007, Accepted.
(5) C. Lee, H. Yu, and E.S. Kim, "Harmonic Operation of Acoustic Transducer for Droplet Ejection Application," Transducers '07, IEEE International Conference on Solid-State Sensors and Actuators, Lyon, France, June 10-14, 2007, pp. 1283-1286.
(6) J.F. Lo, S.J. Chen, H. Yu, E.S. Kim, L. Marcu, and M. Gundersen, "Multi-Cantilever-Driven Rotational Translation for Actuated Micro Optical Grating," Transducers '07, IEEE International Conference on Solid-State Sensors and Actuators, Lyon, France, June 10-14, 2007, pp. 2421-2424.
(7) H. Yu, L. Ai, M. Rouhanizadeh, R. Hamilton, J. Hwang, E. Meng, E.S. Kim and T.K. Hsiai, “Polymer-Based Cardiovascular Shear Stress Sensors,” ASME Frontiers in Biomedical Devices Conference, Irvine, CA, June 7-8, 2007, BioMed2007-38089.
(8) C. Lee, H. Yu, and E.S. Kim, "Microreactions Using Nanoliter Droplets with Oil Encapsulation," IEEE International Micro Electro Mechanical Systems Conference, Kobe, Japan, January 21 – 25, 2007, pp. 81-84.
(9) J. Dutta, H. Yu, C. Lee, and E.S. Kim, "Liquid Jet Propeller Integrated with Reservoir, Channel, and Cover," IEEE International Micro Electro Mechanical Systems Conference, Kobe, Japan, January 21 – 25, 2007, pp. 683-686.
(10) J.F. Lo, L. Marcu, and E.S. Kim, "Wafer-Level Packaging of Three-Dimensional MOEMS Device with Lens Diaphragm," IEEE International Micro Electro Mechanical Systems Conference, Kobe, Japan, January 21 – 25, 2007, pp. 715-718.
2006
Refereed Journal Papers
(1) H. Zhang, W. Pang, H. Yu and E.S. Kim, “High-tone Bulk Acoustic Resonators on Sapphire, Crystal Quartz, Fused Silica and Silicon Substrates,” Journal of Applied Physics, vol. 99, 124911, 2006.
(2) C. Lee, H. Yu and E.S. Kim, “Nanoliter Droplet Coalescence in Air by Directional Acoustic Ejection,” Applied Physics etters, vol. 89, 223902, 2006.
(3) W. Pang, L. Yan, H. Zhang, H. Yu, E.S. Kim and W.C. Tang, ”Femtogam Mass Sensing Platform Based on Lateral-extensional-mode (LEM) Piezoelectric Resonator, ” Applied Physics Letters, vol. 88, 243503, 2006.
(4) J.W. Kwon, H. Yu, Q. Zou and E.S. Kim, ”Directional Ejection of Liquid Droplets by Sectored Self-Focusing Acoustic Transducers Built on ZnO and PZT, ” Journal of Micromechanics and Microengineering, vol. 16, no. 12, pp. 2697-2704, 2006.
(5) C. Lee and E.S. Kim, ”Piezoelectrically Actuated Tunable Capacitor, ” IEEE/ASME Journal of Microelectromechanical Systems, vol. 15, no. 4, pp. 745-755, 2006.
(6) H. Yu, J.W. Kwon and E.S. Kim, ”Microfluidic Mixer and Transporter Based on PZT Self-Focusing Acoustic Transducers, ” IEEE/ASME Journal of Microelectromechanical Systems, vol. 15, no. 4, pp. 1015-1024, 2006.
(7) L. Yan, W. Pang, E.S. Kim and W.C. Tang, ”Single-chip Multiple-frequency VHF Low Impedance Micro Piezoelectric Resonators, ” IEEE Electron Device Letters, vol. 27, no. 4, pp. 246-248, 2006.
(8) J.W. Kwon, S. Kamal-Bahl and E.S. Kim, ”In-situ DNA Synthesis on Glass Substrate for Microarray Fabrication Using Self-Focusing Acoustic Transducer, ” IEEE Transactions on Automation Science and Engineering, vol. 3, no. 2, pp. 152-158, 2006.
Refereed Conference Papers
(1) H. Zhang, Q. Zou, E.S. Kim, A.M. Madni, L.E. Costlow and R.F. Wells, “Frequency-Mismatch-Tolerant Silicon Vibratory Gyroscope without Vacuum Package for Automotive Applications,” World Automation Congress, Budapest, Hungary, July 24-27, 2006, Tracking #ISIAC-244.
(2) C. Lee, H. Yu, and E.S. Kim, “Controlled Droplet Coalescence in Air and Its Application to Micromixing,” Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 4-8, 2006, pp. 106-107.
(3) H. Yu, H. Zhang, W. Pang, and E.S. Kim, “Temperature Stable, Post-Process Tunable, High Q HBARs at 3~5 GHz,” Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 4-8, 2006, pp. 332-335.
(4) C. Lee, H. Yu, and E.S. Kim, "Acoustic Ejector with Novel Lens Employing Air-Reflectors," IEEE International Micro Electro Mechanical Systems Conference, Istanbul, Turkey, January 22 – 26, 2006, pp. 170-173.
(5) H. Zhang, W. Pang and E.S. Kim, "Micromachined SU-8 Probe Integrated with Film-bulk-acoustic Resonant Mass Sensor," IEEE International Micro Electro Mechanical Systems Conference, Istanbul, Turkey, January 22 – 26, 2006, pp. 82-85.
(6) W. Pang, L. Yan, H. Zhang, H. Yu, E.S. Kim and W.C. Tang, "Ultra-sensitive Mass Sensor Based on Lateral Extensional Mode Piezoelectric Resonator," IEEE International Micro Electro Mechanical Systems Conference, Istanbul, Turkey, January 22 – 26, 2006, pp. 78-81.
(7) J. Lo, Q. Fang, W. Pang, T. Papaioannou, Q. Shui, E.S. Kim, M.A. Gundersen and L. Marcu, (Invited Paper), “Packaging and Characteristics of a Micro Fluorescence Spectroscopy Analyzer,” SPIE International Symposium on Biomedical Optics 2006, San Jose, California, January 21-26, 2006, Proceedings of SPIE, vol. 6080, 60800H (Feb. 25, 2006).
2005
Refereed Journal Papers
(1) L. Yan, W. Pang, E.S. Kim and W.C. Tang, “Piezoelectrically-transduced Low-impedance Microelectromechanical Resonators,” Applied Physics Letters, vol. 87, no. 15, 154103, 2005.
(2) J.W. Kwon, H. Yu and E.S. Kim, “Film Transfer and Bonding Techniques for Covering Single-Chip Ejector Array with Microchannels and Reservoirs,” IEEE/ASME Journal of Microelectromechanical Systems, vol. 14, no. 6, pp. 1399-1408, 2005.
(3) W. Pang, H. Zhang, H. Yu and E.S. Kim, "Micromachined Acoustic Wave Resonator Isolated from Substrate," IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, vol. 52, no. 8, pp. 1239-1246, 2005.
(4) H. Zhang, M. Marma, E.S. Kim, C. McKenna and M. Thompson, "A Film Bulk Acoustic Resonator in Liquid Environments," Journal of Micromechanics and Microengineering, vol. 15, no. 10, pp. 1911-1916, 2005.
(5) W. Pang, H. Yu, H. Zhang, and E.S. Kim, "Temperature Compensated Film Bulk Acoustic Resonator above 2GHz," IEEE Electron Device Letters, vol. 26, no. 6, pp. 369-371, 2005.
(6) S.H. Yi and E.S. Kim, “Micromachined Piezoelectric Microspeaker,” Japanese Journal of Applied Physics, vol. 44, no. 6A, pp. 3836-3841, 2005.
(7) H. Zhang and E.S. Kim, "Micromachined Acoustic Resonant Mass Sensor," IEEE/ASME Journal of Microelectromechanical Systems, vol. 14, no. 4, pp. 699-706, 2005.
(8) J.W. Kwon and E.S. Kim, "Fine ZnO Patterning With Controlled Sidewall-Etch-Front Slope," IEEE/ASME Journal of Microelectromechanical Systems, vol. 14, no. 3, pp. 603-609, 2005.
(9) C.H. Han and E.S. Kim, “Simulation of Piezoelectric Dome-Shaped-Diaphragm Acoustic Transducers,” Journal of Semiconductor Technology and Science, vol. 5, no. 1, pp. 17-23, 2005.
(10) G.-H. Feng and E.S. Kim, "Piezoelectrically Actuated Dome-Shaped-Diaphragm Micropump," IEEE/ASME Journal of Microelectromechanical Systems, vol. 14, pp. 192-199, 2005.
(11) H. Yu, J.W. Kwon and E.S. Kim, "Chembio Extraction on a Chip by Nanoliter Droplet Ejection," Lab on a Chip, vol. 5, no. 3, pp. 344 - 349, 2005.
(12) G.-H. Feng, C.C. Sharp, Q.F. Zhou, W. Pang, E.S. Kim and K.K. Shung, "Fabrication of MEMS ZnO Dome-Shaped-Diaphragm Tranducers for High Frequency Ultrasonic Imaging," Journal of Micromechanics and Microengineering, vol. 15, no. 3, pp. 586-590, 2005.
(13) G. Soundararajan, M. Rouhanizadeh, H. Yu, L. DeMaio, E.S. Kim and T.K. Hsiai, "MEMS Shear Stress Sensors for Microcirculation," Sensors and Actuators A: Physical, vol. 118, no. 1, pp. 25-32, 2005.
Refereed Conference Papers
(1) H. Zhang, M. Marma, E.S. Kim, C. McKenna and M. Thompson, "Mercury Ion Sensing by Film-Bulk-Acoustic-Resonator Mass Sensor," IEEE Conference on Sensors, Irvine, CA, Oct. 31 - Nov. 3, 2005, pp. 203-206.
(2) W. Pang, H. Zhang and E.S. Kim, "Analytical and Experimental Study on Second Harmonic Response of FBAR for Oscillator Application," IEEE International Ultrasonics Symposium, Rotterdam, The Netherlands, September 18-21, 2005, pp. 2136-2139.
(3) S. Kamal-Bahl and E.S. Kim, "DNA Microarray Fabrication Using Directional Self-Focusing Acoustic Transducer Array," IEEE International Ultrasonics Symposium, Rotterdam, The Netherlands, September 18-21, 2005, pp. 960-963.
(4) H. Zhang, W. Pang and E.S. Kim, "High-frequency Bulk Acoustic Resonant Microbalances in Liquid," Joint IEEE International Frequency Control Symposium and Precise Time and Time Interval (PTTI) Systems and Applications Meeting, Vancouver, Cananda, August 29-31, 2005, pp. 73-77.
(5) W. Pang, H. Zhang, J.J. Kim, H. Yu and E.S. Kim, "High-Tone Bulk Acoustic Resonator Integrated with Surface Micromachined FBAR Filter on a Single Chip," Transducers '05, IEEE International Conference on Solid-State Sensors and Actuators (Seoul, Korea), June 5-9, 2005, pp. 2057-2060.
(6) J.J. Kim, H. Zhang, W. Pang, H. Yu and E.S. Kim, "Low Phase Noise, FBAR-Based Voltage Controlled Oscillator without Varactor," Transducers '05, IEEE International Conference on Solid-State Sensors and Actuators (Seoul, Korea), June 5-9, 2005, pp. 1063-1066.
(7) J.W. Kwon, S. Kamal-Bahl and E.S. Kim, "Film Transfer and Bonding Technique to Cover Lab on a Chip," Transducers '05, IEEE International Conference on Solid-State Sensors and Actuators (Seoul, Korea), June 5-9, 2005, pp. 940-943.
(8) H. Zhang, J.J. Kim, W. Pang, H. Yu and E.S. Kim, "5GHz Low-phase-noise Oscillator Based on FBAR with Low TCF," Transducers '05, IEEE International Conference on Solid-State Sensors and Actuators (Seoul, Korea), June 5-9, 2005, pp. 1100-1101.
(9) S.H. Yi, J.M. Park, Y.H. Park, S.H. Han, N.K. Min, C.H. Cho and E.S. Kim, "Novel NDIR CO2 Sensor for Indoor Air Quality Monitoring," Transducers '05, IEEE International Conference on Solid-State Sensors and Actuators (Seoul, Korea), June 5-9, 2005, pp. 1211-1214.
(10) W. Pang, H. Yu, H. Zhang and E.S. Kim, "Electrically Tunable and Temperature Compensated FBAR," IEEE MTT-S 2005 International Microwave Symposium (Long Beach, California), June 12 - 17, 2005, Technical Digest (ISBN:0-7803-8846-1).
(11) W. Pang, H. Zhang, J.J. Kim, H. Yu and E.S. Kim, "High-Tone Bulk Acoustic Resonator Integrated with FBAR Filter on a Single Chip," IEEE MTT-S 2005 International Microwave Symposium (Long Beach, California), June 12 - 17, 2005, Technical Digest (ISBN:0-7803-8846-1).
(12) H. Yu, W. Pang, H. Zhang and E.S. Kim, "Film Bulk Acoustic Resonator at 4.4 GHz with Ultra Low Temperature Coefficient of Resonant Frequency," IEEE International Micro Electro Mechanical Systems Conference, Miami, Florida, January 30 - February 3, 2005, pp. 28-31.
(13) J. Lo, E.S. Kim, M.A. Gundersen and L. Marcu, "Piezoelectric Optical MEMS Scanning Fluorescence Biosensor," SPIE International Symposium on Biomedical Optics 2005, San Jose, California, January 22-27, 2005, Proc. SPIE vol. 5692, pp. 103-110
2004
Refereed Journal Papers
(1) G.-H. Feng and E.S. Kim, " Micropump Based on PZT Unimorph and One-Way Parylene Valves," Journal of Micromechanics and Microengineering, vol. 14, no. 4, pp. 429-435, 2004.
Refereed Conference Papers
(1) G.E. Loeb, W. Tan, N. Sachs, Q. Zou and E.S. Kim, "A Modular Approach to Sensing Limb Position in FES Patients," Proc. 9th Ann. Mtg. International Functional Electrical Stimulation Soc., Bournemouth, U.K., Sept. 6-9, 2004 (http://www.ifessnet2004.tk)
(2) Q. Zou, W. Tan, E.S. Kim, J. Singh and G.E. Loeb, "Implantable Biaxial Piezoresistive Accelerometer for Sensorimotor Control," IEEE Engineering in Medicine and Biology Society (EMBS) Annual Conference (San Francisco, California), September 1-5, 2004, pp. 4279-428.
(3) W. Tan, Q. Zou, E.S. Kim and G.E. Loeb, "Sensing Human Arm Postureition and Orientation with Implantable Sensors," IEEE Engineering in Medicine and Biology Society (EMBS) Annual Conference (San Francisco, California), September 1-5, 2004, pp. 4290-4293.
(4) W. Pang, H. Zhang, H. Yu and E.S. Kim, “Electrically Tunable and Switchable Film Bulk Acoustic Resonator,” IEEE International Ultrasonics Symposium (Montreal, Canada), August 24-27, 2004, pp. 22-26.
(5) W. Pang, H. Yu, H. Zhang and E.S. Kim, “Self-Aligned Lateral Field Excitation Film Acoustic Resonator with Very Large Electromechanical Coupling,” IEEE International Ultrasonics Symposium (Montreal, Canada), August 24-27, 2004, pp. 558-561.
(6) G. -H Feng, C. Sharp, Q.F. Zhou, E.S. Kim and K.K. Shung, “Fabrication of Dome-Shaped-Diaphragm-Transducer Array for High Frequency Biomedical Image Application,” IEEE International Ultrasonics Symposium (Montreal, Canada), August 24-27, 2004, pp. 1950-1953.
(7) C. Sharp, G.-H. Feng, Q.F. Zhou, J. Cannata, E.S. Kim and K.K. Shung, “200 MHz Self-Focused ZnO MEMS Ultrasonic Transducers for Biomedical Imaging,” IEEE International Ultrasonics Symposium (Montreal, Canada), August 24-27, 2004, pp. 1946-1949.
(8) L. Yan, W. Pang, J. Wu, W.C. Tang and E.S. Kim, "High Frequency Micromechanical Piezo Actuated Disk Resonator," Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 6-10, 2004, pp. 372-375.
(9) G.-H. Feng and E.S. Kim, "Micropump Based on PZT Unimorph and One-Way Parylene Valves," Journal of Micromechanics and Microengineering, vol. 14, no. 4, pp. 429-435, 2004.
(10) W. Pang, H. Zhang, S. Whangbo and E.S. Kim, "High Q Film Bulk Acoustic Resonator from 2.4 to 5.1GHz," IEEE International Micro Electro Mechanical Systems Conference, Maastricht, The Netherlands, January 25-29, 2004, pp. 805-808.
(11) H. Yu and E.S. Kim, "Ultrasonic Underwater Thruster," IEEE International Micro Electro Mechanical Systems Conference, Maastricht, The Netherlands, January 25-29, 2004, pp. 486-489.
(12) H. Zhang, M. Marma, E.S. Kim, C. McKenna and M. Thompson, "Implantable Resonant Mass Sensor For Liquid Bio-chemical Sensing," IEEE International Micro Electro Mechanical Systems Conference, Maastricht, The Netherlands, January 25-29, 2004, pp. 347-350.
(13) Q. Zou, W. Tan, E.S. Kim, and G.E. Loeb, "Highly Symmetric Tri-axis Piezoelectric Bimorph Accelerometer," IEEE International Micro Electro Mechanical Systems Conference, Maastricht, The Netherlands, January 25-29, 2004, pp. 197-200
2003
Refereed Journal Papers
(1) M. Niu and E.S. Kim, "Piezoelectric Bimorph Microphone Built on Micromachined Parylene Diaphragm," IEEE/ASME Journal of Microelectromechanical Systems, vol. 12, pp. 892-898, December 2003.
Refereed Conference Papers
(1) H. Yu and E.S. Kim, "Liquid Separation for Chemical Extraction by Large Droplet Ejection and Millimeter High Liquid Fountain," Transducers '03, IEEE International Conference on Solid-State Sensors and Actuators (Boston, MA), June 8-12, 2003, pp. 611-614.
(2) Q. Zou, Wei Tan, E.S. Kim, and Gerald E. Loeb "Implantable Bimorph Piezoelectric Accelerometer for Feedback Control of Functional Neuromuscular Stimulation," Transducers '03, IEEE International Conference on Solid-State Sensors and Actuators (Boston, MA), June 8-12, 2003, pp. 1379-1382.
(3) K. Lee, S. Park and E.S. Kim, "Improved Electromagentic Displacement Transducer with Large Force for Implantable Middle Ear Hearing Aid," Transducers '03, IEEE International Conference on Solid-State Sensors and Actuators (Boston, MA), June 8-12, 2003, pp. 1217-1220.
(4) H. Zhang and E.S. Kim, "Vapor and Liquid Mass Sensing by Micromachined Acoustic Resonator," IEEE International Micro Electro Mechanical Systems Conference, Kyoto, Japan, January 19-23, 2003, pp. 470-473.
(5) H. Yu and E.S. Kim, "Micropropulsion of Air and Liquid Jet by Acoustic Streaming," IEEE International Micro Electro Mechanical Systems Conference, Kyoto, Japan, January 19-23, 2003, pp. 76-79.
(6) G.-H. Feng and E.S. Kim, "Universal Concept for Fabricating Micron to Millimeter Sized 3-D Parylene Structures on Rigid and Flexible Substrates," IEEE International Micro Electro Mechanical Systems Conference, Kyoto, Japan, January 19-23, 2003, pp. 594-597.
2002
Refereed Journal Papers
(1) S.H. Yi, F. von Preissig and E.S. Kim, “Electroless Nickel Films: Properties and Fabricated Cavity Structure,” IEEE/ASME Journal of Microelectromechanical Systems, vol. 11, pp. 293-301, August 2002.
(2) J.W. Kwon and E.S. Kim, "Multi-Level Microfluidic Channel Routing with Protected Convex Corners," Sensors and Actuators: A. Physical, vol. 97-98, pp. 729-733, April 2002.
Refereed Conference Papers
(1) H. Zhang and E.S. Kim, “Air-backed Al/ZnO/Al Film Bulk Acoustic Resonator without Any Support Layer,” IEEE International Frequency Control Symposium, New Orleans, LA, May 29-31, 2002, pp. 20-26.
(2) J.W. Kwon and E.S. Kim, " Fine ZnO Patterning with Controlled Sidewall-Etch-Front Slope," Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 2 - 6, 2002, pp. 223-226.
(3) H. Yu and E.S. Kim, " Large Area Microfluidic Mixer Integrated with Linear Fluidic Transporters and Reservoirs," Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 2 - 6, 2002, pp. 362-365.
(4) S.H. Yi and E.S. Kim, "Piezoelectric Micro-speaker with Compressive Nitride Diaphragm," IEEE International Micro Electro Mechanical Systems Conference, Las Vegas, Nevada, January 20-24, 2002, pp. 260-263.
(5) J.W. Kwon, Q. Zou and E.S. Kim, "Directional Ejection of Liquid Droplets through Sectoring Half-Wave-Band Sources of Self-Focusing Acoustic Transducer," IEEE International Micro Electro Mechanical Systems Conference, Las Vegas, Nevada, January 20-24, 2002, pp. 121-124.
(6) H. Yu and E.S. Kim, "Noninvasive Acoustic-Wave Microfluidic Driver," IEEE International Micro Electro Mechanical Systems Conference, Las Vegas, Nevada, January 20-24, 2002, pp. 125-128.
2001
Refereed Journal Papers
(1) D. Huang and E.S. Kim, "Micromachined Acoustic-Wave Liquid Ejector," IEEE/ASME Journal of Microelectromechanical Systems, vol. 10, pp. 442-449, September 2001.
Refereed Conference Papers
(1) S.H. Yi and E.S. Kim, " Piezoelectric Bimorph Microphone with Serial Electrical Connection," International Mechanical Engineering Congress and Exposition, Symposium on Microelectromechanical Systems (New York, NY), November 11-16, 2001, CD Index No. MEMS-23857 (7 pages).
(2) J.W. Kwon and E.S. Kim, "Microfluidic Channel Routing with Protected Convex Corners," Transducers '01, IEEE International Conference on Solid-State Sensors and Actuators (Munich, Germany), June 10-14, 2001, pp. 644-647.
(3) Q. Zou, D. Huang and E.S. Kim, "Water Needle – A New Phenomenon for Ink-Jet Printing," Transducers '01, IEEE International Conference on Solid-State Sensors and Actuators (Munich, Germany), June 10-14, 2001, pp. 894-897.
(4) M. Niu and E.S. Kim, "Bimorph Piezoelectric Acoustic Transducer," Transducers '01, IEEE International Conference on Solid-State Sensors and Actuators (Munich, Germany), June 10-14, 2001, pp. 110-113.
(5) C.-H. Han and E.S. Kim, "Fabrication of Piezoelectric Acoustic Transducers Built on Cantilever-like Diaphragm," IEEE International Micro Electro Mechanical Systems Conference, Interlaken, Switzerland, January 21-25, 2001, pp. 110-113.
2000
Refereed Journal Papers
(1) B. Lee and E.S. Kim, "Analysis of Partly-Corrugated Rectangular Diaphragms Using the Rayleigh Ritz Method," IEEE/ASME Journal of Microelectromechanical Systems, vol. 9, pp. 399-406, September 2000.
Refereed Conference Papers
(1) M. Niu, F. von Preissig and E.S. Kim, "Partially Etched Holes for Residual Stress Release in Diaphragm-Based Pressure Sensors," International Mechanical Engineering Congress and Exposition, Symposium on Microelectromechanical Systems (Orlando, FL), November 5-10, 2000, MEMS-Vol. 2, pp. 227-232.
(2) M. Niu and E.S. Kim, "Residual Stress Effect on Performance of Diaphragm-Based MEMS Pressure Transducers," International Mechanical Engineering Congress and Exposition, Symposium on Microelectromechanical Systems (Orlando, FL), November 5-10, 2000, MEMS-Vol. 2, pp. 269-274.
(3) C.-H. Han and E.S. Kim, "Packaged Parylene-Diaphragm Piezoelectric Microspeaker," International Mechanical Engineering Congress and Exposition, Symposium on Microelectromechanical Systems (Orlando, FL), November 5-10, 2000, MEMS-Vol. 2, pp. 111-115.
(4) C.-H. Han and E.S. Kim, "Micromachined Piezoelectric Ultrasonic Transducers Based on Parylene Diaphragm in Silicon Substrate," IEEE International Ultrasonics Symposium (San Juan, Puerto Rico), October 22-25, 2000, pp. 919-923.
(5) S.H. Yi, F. von Preissig and E.S. Kim, "The Effects of Process Conditions on the Residual Stress and Composition of Electroless Nickel Films for MEMS," 197th ECS Meeting (Toronta, Canada), May 14-18, 2000, Electrochemical Society Proceedings Volume 2000-8, pp. 186-194.
(6) F. von Preissig and E.S. Kim, "Topics in Finite-Element Modeling of Piezoelectric MEMS Devices," Third International Conference on Modeling and Simulation of Microsystems, San Diego, CA, March 27-29, 2000, pp. 269-272.
(7) V. Vivek, Y. Zeng and E.S. Kim, "Novel Acoustic-Wave Micromixer," IEEE International Micro Electro Mechanical Systems Conference, Miyazaki, Japan, January 23-27, 2000, pp. 668-673.
(8) C.-H. Han and E.S. Kim, "Parylene-Diaphragm Piezoelectric Acoustic Transducers," IEEE International Micro Electro Mechanical Systems Conference, Miyazaki, Japan, January 23-27, 2000, pp. 148-152.
1999
Refereed Journal Papers
(1) B. Lee and E.S. Kim, "A Simple and Efficient Method of Analyzing Mechanical Behaviors of Multi-layered Orthotropic Plates in Rectangular Shape," Journal of Micromechanics and Microengineering, vol. 9, pp. 385-393, December 1999.
Refereed Conference Papers
(1) M. Niu, H. Zeng, H. Yan and E.S. Kim, "Extensive Experimental Study on Diaphragm-Based Piezoelectric Microphone," International Mechanical Engineering Congress and Exposition, Symposium on Microelectromechanical Systems (Nashville, TN), November 14-19, 1999, MEMS-Vol. 1, pp. 209-213.
(2) C.-H. Han and E.S. Kim, "Micromachined Piezoelectric Ultrasonic Transducers on Dome-Shaped-Diaphragm in Silicon Substrate," IEEE International Ultrasonics Symposium (Lake Tahoe, NV), October 17-21, 1999, pp. 1167-1172.
(3) H. Wang and E.S. Kim, "Ejection Characteristics of Micromachined Acoustic-Wave Liquid Ejector," Transducers '99, IEEE International Conference on Solid-State Sensors and Actuators (Sendai, Japan), June 7-10, 1999, pp. 1784-1787.
(4) C.-H. Han and E.S. Kim, "Fabrication of Dome-Shaped Diaphragm with Circular Clamped Boundary on Silicon Substrate," IEEE International Micro Electro Mechanical Systems Conference, Orlando, FL, January 17-21, 1999, pp. 505-510.
1998
Refereed Journal Papers
(1) C.-H. Han and E.S. Kim, "Study of Self-Limiting Etching Behavior in Wet Isotropic Etching of Silicon," Japanese Journal of Applied Physics, vol. 37, pp. 6939-6941, December 1998.
(2) F. von Preissig, H. Zeng and E.S. Kim, "Measurement of Piezoelectric Strength in ZnO Thin Films for MEMS Applications," Journal of Smart Materials and Structures, vol. 7, pp. 396-403, June 1998.
(3) X. Zhu and E.S. Kim, "Microfluidic Motion Generation with Acoustic Waves," Sensors and Actuators: A. Physical, vol. 66/1-3, pp. 355-360, April 1998.
Refereed Conference Papers
(1) H. Yan, K.C. Lou, B.C. Lee and E.S. Kim, "Analysis on Multi-layered, Corrugated Diaphragm with Residual Stress," ASME International Mechanical Engineering Congress and Exposition, Symposium on Microelectromechanical Systems (Anaheim, CA), November 15-20, 1998, DSC-Vol. 66, pp. 373-378.
(2) C.-H. Han and E.S. Kim, "Study of Self-Limiting Etching Behavior in Wet Isotropic Etching of Silicon," International Microprocess and Nanotechnology Conference, Kyoungju, Korea, July 13-16, 1998.
(3) H. Lakdawala and E.S. Kim, "Simple Post-Processing Technique to Tune Resonant Frequency of Film Bulk Acoustic Resonators and Stacked Crystal Filters," IEEE International Frequency Control Symposium (Pasadena, CA), May 27-29, 1998, pp. 831-835.
(4) F. von Preissig, H. Zeng, and E.S. Kim, "Test Methods for Characterizing Piezoelectric Thin Films," MRS 1998 Spring Meeting (San Francisco, CA), April 13-17, 1998, Symposium Proceedings Vol. 518, pp. 117-122.
1997
Refereed Conference Papers
(1) H. Keiner, F. von Preissig, H. Zeng, M. Nejhad and E.S. Kim, "Advanced Bulge Test System," MRS 1997 Fall Meeting (Boston, MA), December 1-5, 1997, Syposium Proceedings Vol. 505, pp. 229-234.
(2) X. Zhu and E.S. Kim, "Acoustic-Wave Liquid Mixer," ASME International Mechanical Engineering Congress and Exposition, Symposium on Mechanics in Micro-Electro-Mechanical Systems (Dallas, TX), November 16-21, 1997, DSC-Vol. 62, pp. 35 - 38.
(3) K.C. Lou, X. Zhu, H. Lakdawala and E.S. Kim, "Study on Etch Front of Piezoelectric ZnO Film and New Step Coverage Technique," IEEE International Ultrasonics Symposium (Toronto, Canada), October 5-8, 1997, pp. 565-568.
(4) X. Zhu and E.S. Kim, "Microfluidic Motion Generation with Loosely-Focused Acoustic Waves," Transducers '97, IEEE International Conference on Solid-State Sensors and Actuators (Chicago, IL), June 16-19, 1997, pp. 837-838.
1996
Refereed Conference Papers
(1) H. Yan and E.S. Kim, "Corrugated Diaphragm for Piezoelectric Microphone," the 5th IEEE International Conference on Emerging Technologies and Factory Automation, Kauai, HI, November 18-21, 1996, pp. 503-506.
(2) F. von Preissig, H. Zeng and E.S. Kim, "New Methods of Measuring Key Elastic-Piezoelectric Constant of Thin Films," ASME Winter Annual Meeting, Symposium on Mechanics in Micro-Electro-Mechanical Systems (Atlanta, GA), November 17-22, 1996, DSC-Vol. 59, pp. 307-312.
(3) W.W. Lau, Y. Song and E.S. Kim, "Lateral-Field-Excitation Acoustic Resonators for Monolithic Oscillators and Filters," IEEE International Frequency Control Symposium, Honolulu, HI, June 5 - 7, 1996, pp. 558-562.
(4) Y.L. Huang, H. Zhang, E.S. Kim, S.G. Kim and Y.B. Jeon, “Piezoelectrically Actuated Microcantilever for Actuated Mirror Array Application,” Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 2 - 6, 1996, pp. 191-195.
(5) X. Zhu, E. Tran, W. Wang, E.S. Kim and S.Y. Lee, "Micromachined Acoustic-Wave Liquid Ejector," Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 2 - 6, 1996, pp. 280-282.
1995
Refereed Journal Papers
(1) E. Tran, E.S. Kim and S.Y. Lee, "Fabrication of Mesas and Octagonal Cones in Silicon by Wet Chemical Etching," Journal of Micromechanics and Microengineering, vol. 5, pp. 251-256, September 1995.
(2) Y. Song, E.S. Kim and A. Kapila, "Thermal Stability of Sputter-Deposited ZnO Thin Films," TMS/IEEE Journal of Electronic Materials, vol. 24, pp. 83-86, February 1995.
Refereed Conference Papers
(1) S.Y. Lee, Y.K. Kwong, E.S. Kim and E. Tran, "Local Thermal Decoupling Using Silicon Micromachining," The 1995 March Meeting of American Physical Society (San Jose, CA), March 20-24, 1995.
(2) H. Zhang and E.S. Kim, "Dome-Shaped Diaphragm Microtransducers," MEMS '95, IEEE International Workshop on Micro Electro Mechanical Systems (Amsterdam, Netherlands), Jan. 29 - Feb. 2, 1995, pp. 256-260.
1994
Refereed Journal Papers
(1) A.D. Sathe and E.S. Kim, "Deposition of Thin Film ZnO with Characteristics Close to Bulk Crystal ZnO," Integrated Ferroelectrics, vol. 5, pp. 245-254, November 1994.
Refereed Conference Papers
(1) Y. Huang and E.S. Kim, "Ultrasonic Agitation During Sputter Deposition of Thin Film," ASME Winter Annual Meeting, Symposium on Mechanics of Materials Processing and Manufacturing (Chicago, IL), November 6-11, 1994, AMD-Vol. 194, pp. 13-18.
1993
Refereed Journal Papers
(1) A.K. Aggarwal and E.S. Kim, "Comments on 'Modeling of Quantum-Well Lasers for Computer-Aided Analysis of Optoelectronic Integrated Circuits'," IEEE Journal of Quantum Electronics, vol. 29, p. 2414, August 1993.
Refereed Conference Papers
(1) A.D. Sathe and E.S. Kim, "Techniques to Control Residual Stress in ZnO Thin Films," Transducers '93, IEEE International Conference on Solid-State Sensors and Actuators (Yokohama, Japan), June 7-10, 1993, pp. 158-161.
Related Publications
(1) R.P. Ried, E.S. Kim, D.M. Hong and R.S. Muller, "Piezoelectric Microphone with On-Chip CMOS Circuits," IEEE/ASME Journal of Microelectromechanical Systems, vol. 2, pp. 111-120, September 1993
(2) R.P. Ried, E.S. Kim, D.M. Hong and R.S. Muller, "Residual-Stress Compensation in Clamped-Clamped Micromachined Plates," ASME Winter Annual Meeting, Symposium on Micro-Mechanical Systems (Anaheim, CA), November 8-13, 1992, DSC-Vol. 40, pp. 23 - 32.
(3) E.S. Kim, R.S. Muller and R.S. Hijab, "Front-to-Backside Alignment Using Resist-Patterned Etch Control and One Etching Step," IEEE/ASME Journal of Microelectromechanical Systems, vol. 1, pp. 95-99, June 1992.
(4) E.S. Kim, J.R. Kim and R.S. Muller, "Improved IC-Compatible Piezoelectric Microphone and CMOS Process," Transducers '91, IEEE International Conference on Solid-State Sensors and Actuators (San Francisco, CA), June 23-27, 1991, pp. 270-273.
(5) R.A. Stewart, J.R. Kim, E.S. Kim, R.M. White and R.S. Muller, "Young's Modulus and Residual Stress of LPCVD Silicon-rich Silicon Nitride Determined from Membrane Deflection," Sensors and Materials, vol. 2, pp. 285-298, May 1991.
(6) E.S. Kim, R.S. Muller and P.R. Gray, "Integrated Microphone with CMOS Circuits on A Single Chip," IEEE International Electron Devices Meeting (Washington, D.C.), Dec. 3-6, 1989, pp. 880-883.
(7) E.S. Kim and R.S. Muller, "IC-Processed Piezoelectric Microphone," IEEE Electron Device Letters, vol. EDL-8, No.10, pp. 467-468, Oct. 1987.
(8) E.S. Kim and R.S. Muller, "Piezoelectric Readout Miniature Microphone," Proc. International Symposium on Microelectronics (Minneapolis, MN), Sept. 28-30, 1987, pp. 290-295.
(9) E.S. Kim and R.S. Muller, "Micromachined ZnO on Silicon Nitride Pressure Sensor," IEEE International Electron Devices Meeting (Los Angeles, CA), Dec. 7-10, 1986, pp. 807-808.